개요

The Olympus AL110-LMB86 is an automated wafer loader designed for use with the MX61 microscope. It belongs to the AL110 series of programmable wafer handlers, which are known for their cost-effectiveness and versatility. These features make them an ideal choice when a programmable wafer handler is needed to increase throughput. The AL110 series offers a range of formats, as well as non-contact optical wafer centering and notch detection. It also boasts high-throughput and is class 10 compatible, with a stainless steel facade that makes it suitable for use in clean rooms. Additionally, it can be integrated with an MX50 or MX80 via a manual or motorized shuttle stage, allowing for automated wafer inspections.