개요

The double-side scrubber SS-W60A-AR responds to the strict processing needs for the next-generation processes with complete contamination control and the latest precision processing capacity. The body is compact allowing installation space to be greatly reduced. Attention has also been paid to the operability, maintenance and safety. The SS-W60A-AR applies to 6-inch wafers, and the SS-W80A-AR supports 8-inch wafers