개요

The Spin Scrubber SS-3000 is a cleaning system used in the semiconductor industry. It features increased processing capacity, C.O.O. reduction and user-friendly operation. The SS-3000 supports next-generation processes using 300 mm wafers and offers a reduced footprint. Its cleaning performance has been greatly enhanced to pass newer, stricter evaluation criteria. The SS-3000 is ideal for the increasingly reduced size of design rules, ensuring an ample process margin. Reduced chemical and DI water use combined with high-speed processing will minimize your running costs. Maintenance and other operations have been extensively automated to facilitate overall operability.