개요

The SSEC 3303/4 systems are distinguished by their full automation and capacity to accommodate up to four processing modules. These systems come equipped with the flexibility of one, two, or three handling robots to guarantee efficient, high-volume operations, even when managing intricate serial procedures. With an option to choose from the sturdy bulkhead style or the spacious ballroom style, these systems demonstrate great versatility. Notably, the tooling incorporated in these systems can effortlessly support wafers of up to 300mm, further enhancing their adaptability in the semiconductor manufacturing industry. The 3303/4 systems exemplify SSEC's commitment to delivering top-tier, flexible solutions for diverse operational needs.