개요

The UW300Z is a 300mm cleaning system developed by Tokyo Electron (TEL) that offers industry-leading reliability and reduced cost of ownership. Like TEL’s UW8000 Cleaning System, the UW300Z has performed extremely well under the exacting requirements of TEL’s extensive testing. The system features Z-axis handling, which allows for smaller tank volumes, thus reducing the use of DIW and chemical consumption, and improving waste management. The UW300Z has the capability for both conventional and combo-tank (in-situ) processing and offers full FEOL surface preparation solutions. This makes it an excellent choice for those looking to improve their cleaning processes while reducing costs.