EQUINOX
개요
Equinox is a single wafer, multi-chamber process platform for cassette-to-cassette cleaning, etching, developing, and electroplating. It offers configurations from one to six chambers with a centralized controller and robotics. The platform is capable of performing various processes on substrates ranging from 3" to 200mm in size. It works by using a central dual end-effector robot to transfer substrates from cassette to chamber and back again. Equinox can help automate manual steps and transfers while increasing throughput with a small footprint. It offers ultra-clean dry-to-dry operation with uniform plating and etching results. The platform can integrate sequential process steps with a low cost of ownership (CoO) and provides a migration path from small R&D platforms to production systems with the same process chambers and control features.
활성 등재물
11
서비스
검사, 보험, 감정, 물류
SEMITOOL
EQUINOX
Wet Processing / Wafer Cleaning빈티지: 조건: 중고마지막 검증일60일 이상 전SEMITOOL
EQUINOX
Wet Processing / Wafer Cleaning빈티지: 2010조건: 중고마지막 검증일60일 이상 전SEMITOOL
EQUINOX
Wet Processing / Wafer Cleaning빈티지: 2010조건: 중고마지막 검증일60일 이상 전SEMITOOL
EQUINOX
Wet Processing / Wafer Cleaning빈티지: 2005조건: 중고마지막 검증일60일 이상 전