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환경 설정

Sealed X-ray tube, Cu K-alpha radiation (1.54 Å), new X-ray tube installed in 2020 Optics on primary side: Goebel mirror, absorber and beam compressor Eulerian cradle wit 4” wafer holder (X, Y, Z, rotation and chi/sample tilt), sample holder vacuum pump Optics on secondary side: Lynxeye X-ray line detector and Pathfinder X-ray point detector (variable slit and three bounce Ge(220) crystal) Scans that can be performed: 2Theta/Theta, detector scan, rocking curve, reflectivity, GIXRD, reciprocal space mapping Instrument computer with the following installed Bruker XRD software: XRDCommander, Config, Leptos, XRDWizard, EVA, D8Tools Comes with instruction manuals (paper copies) and assorted minor spare parts (slits, screws, grease..) The XRD-system is complete and fully functional except for some minor mechanical problems with the sample rotation and XY stage.

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The Bruker D8 DISCOVER is an advanced X-ray diffraction platform with a wide range of applications in high-performance materials research and methodology development. It incorporates state-of-the-art technology, including the unique ability to perform in-plane grazing incidence diffraction (IP-GID). The system serves as a versatile laboratory platform for developing new methodologies that can be seamlessly transferred to the D8 FABLINE tool, enabling smooth implementation in semiconductor fabs.