설명
설명 없음환경 설정
details attached. -the endcap drive gear motors should be replaced - Following gases connected: H2, NH3, O2, Ar, N2, TMA (Trimethylaluminum) was our aluminum source. We deposited only Al2O3 in this system - Substrate holder: (240mm) resistance-heated (up to 400C) - Remote Plasma source: 300W capacity at 13.56MHz (RF generator and automatic matching unit included) - Metal Precursors delivery: (2) Bubbler and (2) vapor drawn - Gas lines: Non-toxic gas lines (3 lines) and toxic gas lines (2 lines). Each gas line is equipped with its individual MFC. - Water delivery kit included - Ozone generator included. - Vacuum gauges: 1000mT CM gauge + Penning - Pumps: dry pump with precursor foreline trap fitted - Pumping pipe work: 40mm (heating kit included)OEM 모델 설명
미제공문서
OXFORD
Opal-PEALD
검증됨
카테고리
ALD
마지막 검증일: 30일 이상 전
주요 품목 세부 정보
조건:
Used
작동 상태:
알 수 없음
제품 ID:
49566
웨이퍼 사이즈:
알 수 없음
빈티지:
2015
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
유사 등재물
모두 보기OXFORD
Opal-PEALD
카테고리
ALD
마지막 검증일: 30일 이상 전
주요 품목 세부 정보
조건:
Used
작동 상태:
알 수 없음
제품 ID:
49566
웨이퍼 사이즈:
알 수 없음
빈티지:
2015
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available