KOKUSAI-ELECTRIC (KE)

DD 802V H

QUIXACE II DOPED POLY

DJ 853V 8BL

DJ-1223VN	

QUIXACE II

QUIXACE II POLY

DJ-1206VN-DF

DJ 1236VN DF

DD-812V

QUIXACE II NITRIDE

"VERTRON-III(F3) Model Numbers:DD-823V/DJ-823V. Hitachi Kokusai Electric's Vertron-III series Vertical Diffusion/LPCVD systems have been developed especially for 200mm wafers which are predominantly used in high-volume-semiconductor device manufacturing. The Vertron-III platform offers solid reliability and provides superior cost of ownership (Co0)to our customers.
 
The Vertron-III offers all conventional films as well as the unique processes of BTBAS Si3N4, and Selective SiGe epitaxy. Hitachi Kokusai is recognized as a leader in thermal solutions and customer satisfaction."

DD-823V

"VERTRON-III(G) Model Numbers:DD-833V/DJ-833V. Hitachi Kokusai Electric's Vertron-III series Vertical Diffusion/LPCVD systems have been developed especially for 200mm wafers which are predominantly used in high-volume-semiconductor device manufacturing. The Vertron-III platform offers solid reliability and provides superior cost of ownership (Co0)to our customers.
 
The Vertron-III offers all conventional films as well as the unique processes of BTBAS Si3N4, and Selective SiGe epitaxy. Hitachi Kokusai is recognized as a leader in thermal solutions and customer satisfaction."

DJ 833V

"VERTRON-III(J3). Model Numbers: DD-853V/DJ-853V. Hitachi Kokusai Electric's Vertron-III series Vertical Diffusion/LPCVD systems have been developed especially for 200mm wafers which are predominantly used in high-volume-semiconductor device manufacturing. The Vertron-III platform offers solid reliability and provides superior cost of ownership (Co0)to our customers.
 
The Vertron-III offers all conventional films as well as the unique processes of BTBAS Si3N4, and Selective SiGe epitaxy. Hitachi Kokusai is recognized as a leader in thermal solutions and customer satisfaction."

DJ 853V

QUIXACE is KOKUSAI ELECTRIC's latest platform for batch thermal processing of 300mm wafers. The QUIXACE offers high throughput by utilizing advanced technologies in such areas as temperature control, wafer handling automation, reactor purging, and temperature ramping.

QUIXACE

QUIXACE ULTIMATE

VR-70

DJ 1206V-DF

DJ 1223V

DD-802V for diffusion.
The vertical reactor can accommodate 120 150mm wafers and up to 165 in the future.

DD-802V

QUIXACE II ALD NITRIDE 

DD 803V

QUIXACE II ANNEAL

DJ-835V

DJ 1207S-DD

DJ-1206VN-DM

"VERTRON-III(F3). Model Numbers: DD-823V/DJ-823V. Hitachi Kokusai Electric's Vertron-III series Vertical Diffusion/LPCVD systems have been developed especially for 200mm wafers which are predominantly used in high-volume-semiconductor device manufacturing. The Vertron-III platform offers solid reliability and provides superior cost of ownership (Co0)to our customers.
 
The Vertron-III offers all conventional films as well as the unique processes of BTBAS Si3N4, and Selective SiGe epitaxy. Hitachi Kokusai is recognized as a leader in thermal solutions and customer satisfaction."

DJ 823V

DD1223V

QUIXACE ULTIMATE ALD SIN

CX 3000

DJ-802V for LPCVD.
For LPCVD films, from 50 to 100 wafers are processed, depending on the film. 

DJ-802V

DJ-1223 VN-DF

QUIXACE ULTIMATE ALD SIO2

QUIXACE II CURE

DJ-1206VN	

DD803

DD 853V

CX1204

ZESTONE-III: DD-1223V

CX 3202

DD 1223VN

DD 823V-8BL

QUIXACE ULTIMATE ALD TIN

DJ 815V-8L

QUIXACE NITRIDE

DJ 802

DJ-813	

DJ-813V

Vertical furnace, HTO (High Temperature Oxide)

DD 853V-8BL

DJ-802V-H

DD-1206VN-DF

DD 1205V

"VERTRON-III(G) Model Numbers: DD-833V/DJ-833V. Hitachi Kokusai Electric's Vertron-III series Vertical Diffusion/LPCVD systems have been developed especially for 200mm wafers which are predominantly used in high-volume-semiconductor device manufacturing. The Vertron-III platform offers solid reliability and provides superior cost of ownership (Co0)to our customers.
 
The Vertron-III offers all conventional films as well as the unique processes of BTBAS Si3N4, and Selective SiGe epitaxy. Hitachi Kokusai is recognized as a leader in thermal solutions and customer satisfaction."

DD 833V

***PARTS***

VERTRON DD-803V

ADVANCED ACE-300

CX 2000

CX 5000

DD 853

QUIXACE ALDINNA

DD-1810N-DLS

ZESTONE-V(B) DJ-1205V-DF

QUIXACE II TEOS

DD 823V-8PL

ZESTONE- IIIC

VERTRON Ⅲ DJ803

DD1223VNP

DJ 1207S

DJ 1205V

500TC

ZESTONE NITR

DJ 803V

ZESTONE-V(B) DD-1205V

DJ1223VN-CX3	

DD-802

DD-1206V-DF

QUIXACE DF

Zestone-III(C) DJ-1223V

DJ 835-V-8L

DD 1206V DF

QUIXACE DJ-1206-VN

VERTRON 5S

CX 9620

VERTRON III

SYMPHONYMC

ALDINNA DJ-1206VN-DM

Kokusai: Vertex 5, loadlocked vertical tube LPCVD system.

VERTEX 5

DJ-807S-8C

VERTRON DJ-825V

QUIXACE-LV

DJ-1810N-DLS

Vertex-III(F)

VERTRON Ⅲ DD803

DJ1206VN

"VERTEX-(S2).Model Numbers: DD-835V/DJ-835VAs semiconductor devices becomes more highly integrated and miniaturized, it is necessary to control native oxide film growth on the wafer surface at the time of loading for applications such as formation of contact Poly-Si, capacitor nitride, ultra thin oxidation and selective oxidation, etc.
Hitachi Kokusai Electric recommends Load Lock vertical Diffusion/LPCVD Systems, Vertron-V, for these processes to utilize the unique oxygen free load lock chamber mounted directly underneath reactor tube."

DJ 835

"VERTRON-V(S2). Model Numbers: DD-835V/DJ-853V. As semiconductor devices becomes more highly integrated and miniaturized, it is necessary to control native oxide film growth on the wafer surface at the time of loading for applications such as formation of contact Poly-Si, capacitor nitride, ultra thin oxidation and selective oxidation, etc.
Hitachi Kokusai Electric recommends Load Lock vertical Diffusion/LPCVD Systems, Vertron-V, for these processes to utilize the unique oxygen free load lock chamber mounted directly underneath reactor tube."

KOKUSAI-ELECTRIC (KE)

개요

활성 등재물

총 제품 수

서비스

상위 제품

DD 802V H

QUIXACE II DOPED POLY

DJ 853V 8BL

DJ-1223VN

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