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S-9260A

카테고리
CD-SEM
개요

The electron optical system of the Model S-9260 CD-SEM has a 3-nm image resolution, which is applicable to lines/spaces and hole patterns of less than 0.1 µm. Figs. 2 and 3 show examples of observations of the model. It has formula-editor and beam-tilt observation functions that enable detecting process variations early and controlling them easily.

활성 등재물

3

서비스

검사, 보험, 감정, 물류

상위 등재물

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