설명
설명 없음환경 설정
Robot: MECS Modell: UTC820Z Measuring size: 0.1-10µm (was used with somewhat reduced precision up to 30µm) SECS/GEM: is installed, S6F9/S2F17/S2F18 have been used Objective lens: thin aperture with heater, electromagnetic condenser and FCM objective lens system Voltage: 700-1300V CCD Camera: optical field of view 1.2 x 1.2mm. black/white image SW Version: System 15.27, Host 15.26, SEM 15.27, IPS 15.27 (4400), Stage 2.13, Evac 1.06, HV 3.00, WT 2.03 OS: HP-UX Load port, SMIF or Cassette?: open Cassette, 2 ports, no slot mappingOEM 모델 설명
20 (automatic operation) (6-inch wafer, 5-point measurement) wafer sizes: 5, 6, 8문서
문서 없음
유사 등재물
모두 보기
HITACHI
S-8820
카테고리
CD-SEM
마지막 검증일: 60일 이상 전
주요 품목 세부 정보
조건:
Used
작동 상태:
알 수 없음
제품 ID:
133570
웨이퍼 사이즈:
알 수 없음
빈티지:
1996
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
설명
설명 없음환경 설정
Robot: MECS Modell: UTC820Z Measuring size: 0.1-10µm (was used with somewhat reduced precision up to 30µm) SECS/GEM: is installed, S6F9/S2F17/S2F18 have been used Objective lens: thin aperture with heater, electromagnetic condenser and FCM objective lens system Voltage: 700-1300V CCD Camera: optical field of view 1.2 x 1.2mm. black/white image SW Version: System 15.27, Host 15.26, SEM 15.27, IPS 15.27 (4400), Stage 2.13, Evac 1.06, HV 3.00, WT 2.03 OS: HP-UX Load port, SMIF or Cassette?: open Cassette, 2 ports, no slot mappingOEM 모델 설명
20 (automatic operation) (6-inch wafer, 5-point measurement) wafer sizes: 5, 6, 8문서
문서 없음