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S-9260A
카테고리
CD-SEM개요
The electron optical system of the Model S-9260 CD-SEM has a 3-nm image resolution, which is applicable to lines/spaces and hole patterns of less than 0.1 µm. Figs. 2 and 3 show examples of observations of the model. It has formula-editor and beam-tilt observation functions that enable detecting process variations early and controlling them easily.
활성 등재물
4
서비스
검사, 보험, 감정, 물류
