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설명
CD-SEM환경 설정
환경 설정 없음OEM 모델 설명
The Hitachi S-9360 Advanced CD-Measurement SEM has been developed for the sub-100 nm process control of semiconductor devices. It is compatible with 200- and 300-mm wafers, ArF photoresist wafers, as well as other charge sensitive wafers. It has a new automated column alignment function and a new built-in Hitachi real-time process monitor, which keeps track of process conditions at all times. These new features make the S-9360 the best available CD-SEM for a wide range of applications. The S-9360 is not only an R&D tool but also a next-generation mass production tool for the semiconductor industry.문서
문서 없음
HITACHI
S-9360
카테고리
CD-SEM
마지막 검증일: 60일 이상 전
주요 품목 세부 정보
조건:
Used
작동 상태:
알 수 없음
제품 ID:
16028
웨이퍼 사이즈:
12"/300mm
빈티지:
2012
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설명
CD-SEM환경 설정
환경 설정 없음OEM 모델 설명
The Hitachi S-9360 Advanced CD-Measurement SEM has been developed for the sub-100 nm process control of semiconductor devices. It is compatible with 200- and 300-mm wafers, ArF photoresist wafers, as well as other charge sensitive wafers. It has a new automated column alignment function and a new built-in Hitachi real-time process monitor, which keeps track of process conditions at all times. These new features make the S-9360 the best available CD-SEM for a wide range of applications. The S-9360 is not only an R&D tool but also a next-generation mass production tool for the semiconductor industry.문서
문서 없음