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설명
In clean room in working condition. No missing parts. To be de-installed soon.환경 설정
환경 설정 없음OEM 모델 설명
The Advanced CD Measurement SEM CG6300 (HITACHI CD-SEM) will offer higher resolution with a fully renewed electron optical system along with improved metrology repeatability and image quality. The electron microscope column is able to select secondary electrons and backscattered electrons emitted from the material depending on the measurement target. In this way, CD-SEM: CG6300 is able to measure the bottom dimensions of deep trenches and holes in via-in-trench*1 BEOL process*2 as well as 3D NAND and DRAM.문서
문서 없음
HITACHI
CG6300
카테고리
CD-SEM
마지막 검증일: 30일 이상 전
주요 품목 세부 정보
조건:
Used
작동 상태:
알 수 없음
제품 ID:
121201
웨이퍼 사이즈:
알 수 없음
빈티지:
알 수 없음
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설명
In clean room in working condition. No missing parts. To be de-installed soon.환경 설정
환경 설정 없음OEM 모델 설명
The Advanced CD Measurement SEM CG6300 (HITACHI CD-SEM) will offer higher resolution with a fully renewed electron optical system along with improved metrology repeatability and image quality. The electron microscope column is able to select secondary electrons and backscattered electrons emitted from the material depending on the measurement target. In this way, CD-SEM: CG6300 is able to measure the bottom dimensions of deep trenches and holes in via-in-trench*1 BEOL process*2 as well as 3D NAND and DRAM.문서
문서 없음