설명
Only ever had silicon slurry and SC1 chemistry aboard환경 설정
2xMPTI(5 CHAMBER) heads 2 extra/spare headsOEM 모델 설명
This 300mm CPM system uses EBARA’s Dry-In/ Dry-Out processing and two-head/ two platen design for maximum operation flexibility. Features include 3-step cleaning, 4 FOUP loading ports, and buff stations.문서
문서 없음
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EBARA
F-REX300
카테고리
CMP
마지막 검증일: 60일 이상 전
주요 품목 세부 정보
조건:
Used
작동 상태:
Installed / Running
제품 ID:
127105
웨이퍼 사이즈:
12"/300mm
빈티지:
2001
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
설명
Only ever had silicon slurry and SC1 chemistry aboard환경 설정
2xMPTI(5 CHAMBER) heads 2 extra/spare headsOEM 모델 설명
This 300mm CPM system uses EBARA’s Dry-In/ Dry-Out processing and two-head/ two platen design for maximum operation flexibility. Features include 3-step cleaning, 4 FOUP loading ports, and buff stations.문서
문서 없음