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Manually loading Photoresist Spin CoaterOEM 모델 설명
The 5110C is a manual load/unload spinner with automatic resist dispensing, spin timing and a 2-speed spread control. The system dispenses a selected amount of resist at low spin speed. A high-speed spin stretches the resist to its final thickness. The quantity of resist dispensed, spindle speeds, dwell and spin times are all variable and can be selected in advance. This allows the user to achieve predictable results, time and time again. An exhaust fan is mounted under the process bowl to allow continuous exhaust flow around the process area. A side mounted belt drive motor with N2 purge, keeps solvents away from all moving parts. The Solitec diaphragm pump allows for accurate dispense volumes every time, and the adjustable teflon valve guarantees accurate and repeatable suckback.문서
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SOLITEC
5110C
카테고리
Coaters & Developers
마지막 검증일: 60일 이상 전
주요 품목 세부 정보
조건:
Used
작동 상태:
알 수 없음
제품 ID:
56476
웨이퍼 사이즈:
알 수 없음
빈티지:
1998
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
설명
설명 없음환경 설정
Manually loading Photoresist Spin CoaterOEM 모델 설명
The 5110C is a manual load/unload spinner with automatic resist dispensing, spin timing and a 2-speed spread control. The system dispenses a selected amount of resist at low spin speed. A high-speed spin stretches the resist to its final thickness. The quantity of resist dispensed, spindle speeds, dwell and spin times are all variable and can be selected in advance. This allows the user to achieve predictable results, time and time again. An exhaust fan is mounted under the process bowl to allow continuous exhaust flow around the process area. A side mounted belt drive motor with N2 purge, keeps solvents away from all moving parts. The Solitec diaphragm pump allows for accurate dispense volumes every time, and the adjustable teflon valve guarantees accurate and repeatable suckback.문서
문서 없음