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3 PMs (8" Convertible) Robot : Brooks Metal PVD deposition Process (Product ): Sputtering Process Modules Configuration 1. Cassette Load Lock Modules -Come with 3 casettes, a Motion Engineering Inc (MEI) 3 axis single arms robot, -Leybold TMP/NT 150/360V/H turbo pump 2. Desorb Modules For wafers orientation and lamps heating, Leybold TMP/NT 150/360V/H turbo pump 3. Transport Modules Brooks MultiTran 5 Bi-symmetric frog-leg type dual arm robot. Leybold TMP 151/361, 600 and 1000 turbo pump. 4. PVDCathode -AE MDX Magatron DrivePower Supply . -CTI cryo on board 8 and 8300 compressor. -VAT Gate valve series 14 -AlCu target 14” diameter 5. PVD Cathode Same as 4. TaAl target 14” diameterOEM 모델 설명
The NOVELLUS CONCEPT TWO is a modular, integrated production system that is capable of depositing both dielectric and conductive metal layers by combining one or more processing chambers around a common, automated robotic wafer handler. It was introduced in November 1991.문서
문서 없음
카테고리
CVD
마지막 검증일: 60일 이상 전
주요 품목 세부 정보
조건:
Used
작동 상태:
알 수 없음
제품 ID:
63716
웨이퍼 사이즈:
6"/150mm, 8"/200mm
빈티지:
알 수 없음
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
유사 등재물
모두 보기
LAM RESEARCH / NOVELLUS
CONCEPT TWO "C2"
카테고리
CVD
마지막 검증일: 60일 이상 전
주요 품목 세부 정보
조건:
Used
작동 상태:
알 수 없음
제품 ID:
63716
웨이퍼 사이즈:
6"/150mm, 8"/200mm
빈티지:
알 수 없음
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
설명
설명 없음환경 설정
3 PMs (8" Convertible) Robot : Brooks Metal PVD deposition Process (Product ): Sputtering Process Modules Configuration 1. Cassette Load Lock Modules -Come with 3 casettes, a Motion Engineering Inc (MEI) 3 axis single arms robot, -Leybold TMP/NT 150/360V/H turbo pump 2. Desorb Modules For wafers orientation and lamps heating, Leybold TMP/NT 150/360V/H turbo pump 3. Transport Modules Brooks MultiTran 5 Bi-symmetric frog-leg type dual arm robot. Leybold TMP 151/361, 600 and 1000 turbo pump. 4. PVDCathode -AE MDX Magatron DrivePower Supply . -CTI cryo on board 8 and 8300 compressor. -VAT Gate valve series 14 -AlCu target 14” diameter 5. PVD Cathode Same as 4. TaAl target 14” diameterOEM 모델 설명
The NOVELLUS CONCEPT TWO is a modular, integrated production system that is capable of depositing both dielectric and conductive metal layers by combining one or more processing chambers around a common, automated robotic wafer handler. It was introduced in November 1991.문서
문서 없음