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설명
MEAS환경 설정
환경 설정 없음OEM 모델 설명
The AIT In-line Defect Inspection System is a high-throughput system that uses proprietary double-darkfield (DDF) laser scanning technology to detect defects, microscratches, and particulate contamination on wafers. It can inspect up to 30 wafers per hour at maximum sensitivity and has a low cost-per-inspection, making it economically feasible to perform in-line process monitoring at more process levels. The system achieves exceptional defect sensitivity through innovations such as a reduced laser spot size and a unique double-darkfield laser scattering design.문서
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KLA
AIT I
카테고리
Defect Inspection
마지막 검증일: 26일 전
주요 품목 세부 정보
조건:
Used
작동 상태:
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제품 ID:
124942
웨이퍼 사이즈:
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빈티지:
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설명
MEAS환경 설정
환경 설정 없음OEM 모델 설명
The AIT In-line Defect Inspection System is a high-throughput system that uses proprietary double-darkfield (DDF) laser scanning technology to detect defects, microscratches, and particulate contamination on wafers. It can inspect up to 30 wafers per hour at maximum sensitivity and has a low cost-per-inspection, making it economically feasible to perform in-line process monitoring at more process levels. The system achieves exceptional defect sensitivity through innovations such as a reduced laser spot size and a unique double-darkfield laser scattering design.문서
문서 없음