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설명
VIBRATION ISOLATION SYSTEM환경 설정
환경 설정 없음OEM 모델 설명
The eV300 defect review system, an advanced, automated SEM designed to gather defect excursion information, analyze and report the results with the improved sensitivity required at smaller design rules. The eV300 supplements optical review by providing topographical information, enabling more accurate defect classification than can be achieved by optical review systems alone.문서
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KLA
eV300
카테고리
Defect Inspection
마지막 검증일: 60일 이상 전
주요 품목 세부 정보
조건:
Used
작동 상태:
알 수 없음
제품 ID:
60862
웨이퍼 사이즈:
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빈티지:
알 수 없음
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설명
VIBRATION ISOLATION SYSTEM환경 설정
환경 설정 없음OEM 모델 설명
The eV300 defect review system, an advanced, automated SEM designed to gather defect excursion information, analyze and report the results with the improved sensitivity required at smaller design rules. The eV300 supplements optical review by providing topographical information, enabling more accurate defect classification than can be achieved by optical review systems alone.문서
문서 없음