설명
Metrology / inspection system환경 설정
Known issues: Not included: SGB Board; Exhaust Tubing Hose 3" Metallic; G5 Host Node; TCD Board; (Qty 13) G5 Nodes and RTAP Robot Handler Inspection Unit FOUP Factory Interface Process: Brightfield Inspection Software Version: 104507 CIM: SECS/GEMOEM 모델 설명
The 2367 UV/visible brightfield inspector is sensitive to a broad range of defects for 65nm and above design nodes. It has improved throughput, high defect sampling, and is field-upgradeable from any 23xx systems. It has a 2x data rate increase, low false count rate, and automatic defect classification algorithms. It can be used with 28xx inspection systems and other KLA-Tencor tools. It also has a Process Window Qualification application for detecting systematic defects.문서
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유사 등재물
모두 보기
KLA
2367
카테고리
Defect Inspection
마지막 검증일: 6일 전
주요 품목 세부 정보
조건:
Used
작동 상태:
알 수 없음
제품 ID:
154831
웨이퍼 사이즈:
12"/300mm
빈티지:
2009
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
설명
Metrology / inspection system환경 설정
Known issues: Not included: SGB Board; Exhaust Tubing Hose 3" Metallic; G5 Host Node; TCD Board; (Qty 13) G5 Nodes and RTAP Robot Handler Inspection Unit FOUP Factory Interface Process: Brightfield Inspection Software Version: 104507 CIM: SECS/GEMOEM 모델 설명
The 2367 UV/visible brightfield inspector is sensitive to a broad range of defects for 65nm and above design nodes. It has improved throughput, high defect sampling, and is field-upgradeable from any 23xx systems. It has a 2x data rate increase, low false count rate, and automatic defect classification algorithms. It can be used with 28xx inspection systems and other KLA-Tencor tools. It also has a Process Window Qualification application for detecting systematic defects.문서
문서 없음