설명
Metrology / inspection system환경 설정
Known issues: Not included: Laser Power Supply; (Qty 5) Optic Parts; Laser Inspection Unit Robot Handler FOUP Factory Interface Process: Darkfield Inspection Software Version: 6.3.24 CIM: SECS/GEMOEM 모델 설명
AIT UV™ is a high-throughput, high-sensitivity wafer inspection product that uses Dual AOD technology to increase scan rate, UV laser illumination for increased sensitivity, and advanced detection algorithms for improved defect capture. It also features real-time Adaptive Mode™ technology, three-channel double-darkfield optics, MultiSpot™ illumination, and Inline Automatic Defect Classification (iADC) for faster results. It is part of KLA-Tencor’s AIT family of inspection systems and is designed for 300-mm inspection and excursion monitoring at 100-nm design rules and below.문서
문서 없음
유사 등재물
모두 보기
KLA
AIT UV
카테고리
Defect Inspection
마지막 검증일: 6일 전
주요 품목 세부 정보
조건:
Used
작동 상태:
알 수 없음
제품 ID:
154796
웨이퍼 사이즈:
12"/300mm
빈티지:
2004
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
설명
Metrology / inspection system환경 설정
Known issues: Not included: Laser Power Supply; (Qty 5) Optic Parts; Laser Inspection Unit Robot Handler FOUP Factory Interface Process: Darkfield Inspection Software Version: 6.3.24 CIM: SECS/GEMOEM 모델 설명
AIT UV™ is a high-throughput, high-sensitivity wafer inspection product that uses Dual AOD technology to increase scan rate, UV laser illumination for increased sensitivity, and advanced detection algorithms for improved defect capture. It also features real-time Adaptive Mode™ technology, three-channel double-darkfield optics, MultiSpot™ illumination, and Inline Automatic Defect Classification (iADC) for faster results. It is part of KLA-Tencor’s AIT family of inspection systems and is designed for 300-mm inspection and excursion monitoring at 100-nm design rules and below.문서
문서 없음