KLA inhabits two worlds: one that’s nanometers in scale and one that’s global. This micro and macro view gives us a unique perspective. We see electrons wave and industries transform. When you put deep science together with optimism, big things happen.

Our process-control and process-enabling solutions are designed to boost the innovation speed of the electronics industry. We help our customers achieve leading-edge performance.

The AIT XUV is KLA-Tencor’s next-generation double-darkfield optical inspection tool. It offers higher throughput and sensitivity for 65-nm production requirements, with a wide range of spot sizes and advanced detection algorithms. It also features an auto-positioning system, autofocus unit, and iADC capability for faster results. It is field upgradeable from the AIT UV platform and provides detection capability for current-layer defects at speeds up to three times faster than the prior-generation AIT XP system, with improved focus, tracking performance, and die-to-die registration.

KLA

AIT XUV

Defect Inspection

유사 등재물

KLA

AIT XUV

KLA

AIT XUV

KLA

AIT XUV

KLA

AIT XUV

KLA

AIT XUV

KLA

AIT XUV

KLA

AIT XUV

AIT XUV

Defect Inspection

유사 등재물

KLA

AIT XUV

KLA

AIT XUV

KLA

AIT XUV

KLA

AIT XUV

KLA

AIT XUV

KLA

AIT XUV

KLA

AIT XUV