설명

Process - Non-Pattern Particle Inspection

환경 설정

Wafer Type: Bare and film Wafer Loader: 300mm Dual FIMS SW Version: NGS Version 5.20 Build 1153 Option: Nomal / ST / HS / Nomal(Oblique)

OEM 모델 설명

The Surfscan SP2 is an unpatterned wafer surface inspection tool that uses UV laser technology, darkfield optics, and advanced algorithms to detect defects as small as 30nm. It provides high sensitivity detection on engineered substrates and has a significant throughput increase over the prior-generation tool. It offers a single tool solution for three technology nodes and has comprehensive wafer surface inspection capabilities. It also enables faster root-cause analysis with improved coordinate accuracy and real-time defect classification capability.