The INOVA xT is a 300mm version of INOVA with proven HCM extendability to the 0.10-micron technology node. It has an industry-leading throughput of 100 wafers per hour (wph).

Lam Research is a leading supplier of plasma etch- and single-wafer clean equipment that plays a pivotal role in defining the features and capabilities of next-generation semiconductor devices. With the addition of Novellus' innovative thin-film deposition and surface preparation product lines, the new Lam Research is well-positioned within the industry to support critical technology transitions including 3D structures in advanced logic and NAND memory, as well as the scaling to 450 mm wafers.

LAM RESEARCH / NOVELLUS

INOVA xT

Tool Configuration:
- MAG7 Brooks Robots
- MC3 Novellus Module controller
- Pfeiffer Turbo and turbo controller
- 3 CTI/Hilex/Brooks Cryo pump
- Brooks FOUP cassette wafer loader
- VAT throttle valve and controllers
- AE PDX 5000 RF Generator
- AE RFG 5500 RF Generator
- MKS RF Generator
- DC power supply
- Right Degas Chamber
- PVD chamber
- Preclean Chamber
- Left Degas Chamber
- Transfer Module with dual blade
- And many more (details attached)

Parts List Cont..xlsx

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INOVA xT

카테고리

개요

활성 등재물

서비스

상위 등재물

Moov에 등재하고 즉시 완벽한 구매자를 찾으십시오.