설명
Metal CVD (Chemical Vapor Deposition)환경 설정
Applied Materials (AMAT) Centura 5200 Ti/TiN MCVD Install Type:Stand Alone Software Version:B4226 Is System On-Line? Yes CE Mark Certified? Yes Clean Room Manuals:No Standard Manuals:No OEM Audit Available? Yes Decontamination Report Exists? Yes Can Produce Wafers AS IS? Yes Any Known Field Modifications? No All Cables Present? Yes Mainframe Type:Centura (Common) System Configuration Chamber / Process Position A:CVD / TiN Position B:CVD / TiN Position C:CVD / Ti Position D:CVD / Ti Directory of Chamber Types for TxZ, TixZ:MCVD Multi-Slot Cooldown:Cooldown Wafer Orienter:Orienter Mainframe Items Signal Lamp Tower:Yes Loadlock Type :Wide body Wafer Mapping:Fast Wafer Slide Sensor:Yes Bolt-On-SMIF:Yes SMIF Loader Make/Model:ASYST/LPT2200 Robot Type:HP+ Blade Type:Quartz Transfer Lid Hoist:No Wafer on Blade Sensor:OTF SBC Version:V452 Remote Service Monitors:No GEMS:No RF Generator Details Chamber Position :Mfgr. / Model Position A :AE / PDX 900-2V Position B :AE / PDX 900-2V Position C :AE / PDX 900-2V Position D :AE / PDX 900-2V Dep Chamber Roughing Pumps Dep Chamber Pump Manufacturer:Edward Model:iH600 Quantity Required:4 Included With System:No Load Lock Pump Manufacturer:Edward Model:iH80 Included With System:No Transfer Chamber Pump Manufacturer:Edward Model:iH80 Included With System:No AMAT Heat Exchanger Model:Steelhead Quantity Required:2 Included With System:No Gas Box Configuration Gas Delivery Type:SLD Gas Panel Interface Type:Standard Gas Panel Exhaust:Top Liquid Delivery Type:TICL4 Gas Box Configuration Gas Line # Gas / Flow (sccm) / MFC Mfgr. / MFC Model 1 Ar / 1000 / STEC / SEC4400M 2 N2 / 1000 / STEC / SEC4400M 3 H2 / 5000 / STEC / SEC4400M 4 Ar / 10000 / STEC / SEC4400M 5 Cl2 / 500 / STEC / SEC4400M 6 Ar / 1000 / STEC / SEC4400M 7 He / 3000 / STEC / SEC4400M 8 NH3 / 1000 / STEC / SEC4400MOEM 모델 설명
Reactor/ MOCVD문서
문서 없음
APPLIED MATERIALS (AMAT)
CENTURA I PHASE II
검증됨
카테고리
Dry / Plasma Etch
마지막 검증일: 60일 이상 전
주요 품목 세부 정보
조건:
Used
작동 상태:
알 수 없음
제품 ID:
77630
웨이퍼 사이즈:
8"/200mm
빈티지:
알 수 없음
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
유사 등재물
모두 보기
APPLIED MATERIALS (AMAT)
CENTURA I PHASE II
카테고리
Dry / Plasma Etch
마지막 검증일: 60일 이상 전
주요 품목 세부 정보
조건:
Used
작동 상태:
알 수 없음
제품 ID:
77630
웨이퍼 사이즈:
8"/200mm
빈티지:
알 수 없음
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
설명
Metal CVD (Chemical Vapor Deposition)환경 설정
Applied Materials (AMAT) Centura 5200 Ti/TiN MCVD Install Type:Stand Alone Software Version:B4226 Is System On-Line? Yes CE Mark Certified? Yes Clean Room Manuals:No Standard Manuals:No OEM Audit Available? Yes Decontamination Report Exists? Yes Can Produce Wafers AS IS? Yes Any Known Field Modifications? No All Cables Present? Yes Mainframe Type:Centura (Common) System Configuration Chamber / Process Position A:CVD / TiN Position B:CVD / TiN Position C:CVD / Ti Position D:CVD / Ti Directory of Chamber Types for TxZ, TixZ:MCVD Multi-Slot Cooldown:Cooldown Wafer Orienter:Orienter Mainframe Items Signal Lamp Tower:Yes Loadlock Type :Wide body Wafer Mapping:Fast Wafer Slide Sensor:Yes Bolt-On-SMIF:Yes SMIF Loader Make/Model:ASYST/LPT2200 Robot Type:HP+ Blade Type:Quartz Transfer Lid Hoist:No Wafer on Blade Sensor:OTF SBC Version:V452 Remote Service Monitors:No GEMS:No RF Generator Details Chamber Position :Mfgr. / Model Position A :AE / PDX 900-2V Position B :AE / PDX 900-2V Position C :AE / PDX 900-2V Position D :AE / PDX 900-2V Dep Chamber Roughing Pumps Dep Chamber Pump Manufacturer:Edward Model:iH600 Quantity Required:4 Included With System:No Load Lock Pump Manufacturer:Edward Model:iH80 Included With System:No Transfer Chamber Pump Manufacturer:Edward Model:iH80 Included With System:No AMAT Heat Exchanger Model:Steelhead Quantity Required:2 Included With System:No Gas Box Configuration Gas Delivery Type:SLD Gas Panel Interface Type:Standard Gas Panel Exhaust:Top Liquid Delivery Type:TICL4 Gas Box Configuration Gas Line # Gas / Flow (sccm) / MFC Mfgr. / MFC Model 1 Ar / 1000 / STEC / SEC4400M 2 N2 / 1000 / STEC / SEC4400M 3 H2 / 5000 / STEC / SEC4400M 4 Ar / 10000 / STEC / SEC4400M 5 Cl2 / 500 / STEC / SEC4400M 6 Ar / 1000 / STEC / SEC4400M 7 He / 3000 / STEC / SEC4400M 8 NH3 / 1000 / STEC / SEC4400MOEM 모델 설명
Reactor/ MOCVD문서
문서 없음