설명
Dry etch system환경 설정
Top-mounted electronics and helium backing (Qty 2) Narrow-gap chambers, positions A/B Phase 3 robot 15-slot storage elevator ZA slit valves, positions A/B Wafer positioning sensor 2-stage cassette loadport (Qty 2) Monitors System SSD and CF card floppy emulator MXP Unibody chamber with narrow-gap lid Seiki STP-301CVB turbo pump Seiki SCU-350D controller MKS manometer (Qty 7) Gas sticks with Brooks GF100 MFCs Gases: HBr, NF3, NF3-2, N2, He/O2, Ar, CF4 (Qty 2) AMAT heat exchangers with 50ft stainless-steel hoses (Qty 2) ENI OEM 12B RF generators AC box at RF rackOEM 모델 설명
미제공문서
문서 없음
카테고리
Dry / Plasma Etch
마지막 검증일: 2일 전
주요 품목 세부 정보
조건:
Used
작동 상태:
알 수 없음
제품 ID:
155465
웨이퍼 사이즈:
알 수 없음
빈티지:
1999
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
APPLIED MATERIALS (AMAT)
P5000 XT
카테고리
Dry / Plasma Etch
마지막 검증일: 2일 전
주요 품목 세부 정보
조건:
Used
작동 상태:
알 수 없음
제품 ID:
155465
웨이퍼 사이즈:
알 수 없음
빈티지:
1999
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
설명
Dry etch system환경 설정
Top-mounted electronics and helium backing (Qty 2) Narrow-gap chambers, positions A/B Phase 3 robot 15-slot storage elevator ZA slit valves, positions A/B Wafer positioning sensor 2-stage cassette loadport (Qty 2) Monitors System SSD and CF card floppy emulator MXP Unibody chamber with narrow-gap lid Seiki STP-301CVB turbo pump Seiki SCU-350D controller MKS manometer (Qty 7) Gas sticks with Brooks GF100 MFCs Gases: HBr, NF3, NF3-2, N2, He/O2, Ar, CF4 (Qty 2) AMAT heat exchangers with 50ft stainless-steel hoses (Qty 2) ENI OEM 12B RF generators AC box at RF rackOEM 모델 설명
미제공문서
문서 없음