설명
Complete system환경 설정
•Polysilicon: 490 •Upgraded TFT monitors •Wafer detection •Incl maintenance console •Condition: AS IS (No Chiller, No pump but with ENI RF Generator) Features: •Single-wafer processing •Fully automated microprocessor control •Cassette-to-cassette wafer processing •Vacuum load locked •Programmable, variable electrode spacing •Endpoint detection •Configurable for 3-inch to 6-inch wafers •Stand-alone or bulk-head mount configurationOEM 모델 설명
The AutoEtch 490 is part of the AutoEtch family, which was Lam’s initial product line. The first AutoEtch product was sold in January 1982. The AutoEtch product line includes the 490, 590, and 690 series for etching polysilicon, oxide, and aluminum film applications, respectively. Despite being more than fourteen years old, continued improvements in both reliability and performance have enabled Lam to continue to offer the AutoEtch series as a suitable product for film applications involving line-widths of 0.8 micron or greater and wafer sizes of six inches or smaller.문서
문서 없음
LAM RESEARCH CORPORATION
AUTOETCH 490
검증됨
카테고리
Dry / Plasma Etch
마지막 검증일: 60일 이상 전
주요 품목 세부 정보
조건:
Used
작동 상태:
알 수 없음
제품 ID:
34293
웨이퍼 사이즈:
6"/150mm
빈티지:
알 수 없음
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
유사 등재물
모두 보기
LAM RESEARCH CORPORATION
AUTOETCH 490
카테고리
Dry / Plasma Etch
마지막 검증일: 60일 이상 전
주요 품목 세부 정보
조건:
Used
작동 상태:
알 수 없음
제품 ID:
34293
웨이퍼 사이즈:
6"/150mm
빈티지:
알 수 없음
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
설명
Complete system환경 설정
•Polysilicon: 490 •Upgraded TFT monitors •Wafer detection •Incl maintenance console •Condition: AS IS (No Chiller, No pump but with ENI RF Generator) Features: •Single-wafer processing •Fully automated microprocessor control •Cassette-to-cassette wafer processing •Vacuum load locked •Programmable, variable electrode spacing •Endpoint detection •Configurable for 3-inch to 6-inch wafers •Stand-alone or bulk-head mount configurationOEM 모델 설명
The AutoEtch 490 is part of the AutoEtch family, which was Lam’s initial product line. The first AutoEtch product was sold in January 1982. The AutoEtch product line includes the 490, 590, and 690 series for etching polysilicon, oxide, and aluminum film applications, respectively. Despite being more than fourteen years old, continued improvements in both reliability and performance have enabled Lam to continue to offer the AutoEtch series as a suitable product for film applications involving line-widths of 0.8 micron or greater and wafer sizes of six inches or smaller.문서
문서 없음