설명
설명 없음환경 설정
Type of Loadlock LAM Number of Process Chamber 3 Chamber Configuration of Mainframe Signal Tower 3 Color Number Loadlock 2 Robot NO User Interface FRONT UI Computer NO TM Motherboard & Node Board YES Terminal Server YES EtherNet Hub YES Light Curtain N/A Transfer Robot Arm NO Gate Valve YES Loadlock gauge YES HPS TM Pressure Gauge YES HPS TM Pressure Control NO Airlock Pressure Gauge YES TM ISO Vlave YES HPS Slit Door YES TM VME Board NO Configuration of Process Module PM1 PM2 PM4 Model of Chamber 9400DSie 9400DSie 9400DSie Year of Construction 2010 2010 2010 Process Gauge NO NO NO Chamber Gauge NO NO NO Foreline Guage NO NO NO Pendulum valve NO NO YES Model of TMP NO NO NO Model of TMP Controller NO NO NO Model of TCP Generator(TOP) NO NO NO Model of Bias Generator(BOT) NO NO NO TCP Matcher YES YES YES Bias Matcher NO NO NO ESC/ chuck YES YES YES ESC Power Supply NO NO NO Backside Helium UPC YES YES YES VME Assembly NO NO NO Foreline Assembly NO NO NO OES NO NO NO Configuration of Power Rack Power 208VAC, 50/60Hz, Ф3, 272AMPSOEM 모델 설명
미제공문서
문서 없음
카테고리
Dry / Plasma Etch
마지막 검증일: 6일 전
주요 품목 세부 정보
조건:
Used
작동 상태:
알 수 없음
제품 ID:
145019
웨이퍼 사이즈:
8"/200mm
빈티지:
알 수 없음
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
유사 등재물
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LAM RESEARCH CORPORATION
ALLIANCE A6 9400DSiE
카테고리
Dry / Plasma Etch
마지막 검증일: 6일 전
주요 품목 세부 정보
조건:
Used
작동 상태:
알 수 없음
제품 ID:
145019
웨이퍼 사이즈:
8"/200mm
빈티지:
알 수 없음
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
설명
설명 없음환경 설정
Type of Loadlock LAM Number of Process Chamber 3 Chamber Configuration of Mainframe Signal Tower 3 Color Number Loadlock 2 Robot NO User Interface FRONT UI Computer NO TM Motherboard & Node Board YES Terminal Server YES EtherNet Hub YES Light Curtain N/A Transfer Robot Arm NO Gate Valve YES Loadlock gauge YES HPS TM Pressure Gauge YES HPS TM Pressure Control NO Airlock Pressure Gauge YES TM ISO Vlave YES HPS Slit Door YES TM VME Board NO Configuration of Process Module PM1 PM2 PM4 Model of Chamber 9400DSie 9400DSie 9400DSie Year of Construction 2010 2010 2010 Process Gauge NO NO NO Chamber Gauge NO NO NO Foreline Guage NO NO NO Pendulum valve NO NO YES Model of TMP NO NO NO Model of TMP Controller NO NO NO Model of TCP Generator(TOP) NO NO NO Model of Bias Generator(BOT) NO NO NO TCP Matcher YES YES YES Bias Matcher NO NO NO ESC/ chuck YES YES YES ESC Power Supply NO NO NO Backside Helium UPC YES YES YES VME Assembly NO NO NO Foreline Assembly NO NO NO OES NO NO NO Configuration of Power Rack Power 208VAC, 50/60Hz, Ф3, 272AMPSOEM 모델 설명
미제공문서
문서 없음