설명
LAM Rainbow 4528XL Dimensions & weight estimates: Mainframe dim (cm): 111.8 x 137.2 x 167.5 Mainframe weight (kg): 788 Bypack1 dim (cm): 55.9 x 81.3 x 110.5 Bypack1 weight (kg): 135 Bypack2 dim (cm): 55.9 x 22.9 x 76.2 Bypack2 weight (kg): 120 Bypack3 dim (cm): 47.5 x 93 x 126 Bypack3 weight (kg): 226.8 mainframe equipment tool환경 설정
LAM Rainbow 4528XL - Plasma Etch Process: Oxide Etch Wafer size: 200 mm Wafer type: Notch Valve type: VAT65 ESC: Yes Bulkhead: Monochromator Endpoint: Yes Software: Envision 1.6.1-005 RF: Paramount Plus VHF3027 Paramount Plus MF5002 Cart: RF cart Iso module: No AC box: -002 (breakers) Gas and process configuration for - Chamber (1) Ar: 500 sccm CF4: 97 sccm CHF3: 104 sccm C4F8: 20 sccm sccm O2 LOW: 20.0 sccm O2 HIGH: 1000.0 sccm N2: 100 sccm Robot type: Harmonic Drive Loader type: Hine indexers 38A Loadlock: Entrance and Exit LL Turbo pumps: HGP pump Controllers: HGP pump controller VAT 65 controller Gas box: AC Rack: Yes (Local power box) in basementOEM 모델 설명
The Rainbow 4520XL is part of Lam Research’s Rainbow series of etch systems. This series addresses processes for wafers up to 200mm and feature sizes as small as 0.35 micron. The Rainbow product line includes the 4400, 4500, 4600, and 4700 series for etching polysilicon, oxide, aluminum, and tungsten films. These systems offer improved etch capability, reliability, and performance through unique features such as a patented wafer handling system and a proprietary source for generating stable plasma.문서
문서 없음
카테고리
Dry / Plasma Etch
마지막 검증일: 60일 이상 전
주요 품목 세부 정보
조건:
Used
작동 상태:
알 수 없음
제품 ID:
132398
웨이퍼 사이즈:
8"/200mm
빈티지:
2000
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
유사 등재물
모두 보기
LAM RESEARCH CORPORATION
RAINBOW 4520XL
카테고리
Dry / Plasma Etch
마지막 검증일: 60일 이상 전
주요 품목 세부 정보
조건:
Used
작동 상태:
알 수 없음
제품 ID:
132398
웨이퍼 사이즈:
8"/200mm
빈티지:
2000
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
설명
LAM Rainbow 4528XL Dimensions & weight estimates: Mainframe dim (cm): 111.8 x 137.2 x 167.5 Mainframe weight (kg): 788 Bypack1 dim (cm): 55.9 x 81.3 x 110.5 Bypack1 weight (kg): 135 Bypack2 dim (cm): 55.9 x 22.9 x 76.2 Bypack2 weight (kg): 120 Bypack3 dim (cm): 47.5 x 93 x 126 Bypack3 weight (kg): 226.8 mainframe equipment tool환경 설정
LAM Rainbow 4528XL - Plasma Etch Process: Oxide Etch Wafer size: 200 mm Wafer type: Notch Valve type: VAT65 ESC: Yes Bulkhead: Monochromator Endpoint: Yes Software: Envision 1.6.1-005 RF: Paramount Plus VHF3027 Paramount Plus MF5002 Cart: RF cart Iso module: No AC box: -002 (breakers) Gas and process configuration for - Chamber (1) Ar: 500 sccm CF4: 97 sccm CHF3: 104 sccm C4F8: 20 sccm sccm O2 LOW: 20.0 sccm O2 HIGH: 1000.0 sccm N2: 100 sccm Robot type: Harmonic Drive Loader type: Hine indexers 38A Loadlock: Entrance and Exit LL Turbo pumps: HGP pump Controllers: HGP pump controller VAT 65 controller Gas box: AC Rack: Yes (Local power box) in basementOEM 모델 설명
The Rainbow 4520XL is part of Lam Research’s Rainbow series of etch systems. This series addresses processes for wafers up to 200mm and feature sizes as small as 0.35 micron. The Rainbow product line includes the 4400, 4500, 4600, and 4700 series for etching polysilicon, oxide, aluminum, and tungsten films. These systems offer improved etch capability, reliability, and performance through unique features such as a patented wafer handling system and a proprietary source for generating stable plasma.문서
문서 없음