TCP 9400
개요
TCP 9400 is part of Lam’s TCP product line of high-density, low-pressure systems that were introduced in late 1992. It incorporates the Company’s patented Transformer Coupled Plasma source technology for etching 0.35 micron and smaller geometries. The TCP 9400 series is designed for polysilicon and polycide etch applications and is used to produce a broad range of advanced logic and memory devices. The system operates at lower pressures for improved pattern transfer control and higher plasma density for higher etch rates, with independent power control to the lower electrode, which improves etch results across a wider process window. The TCP system is designed to offer customers a reliable, lower cost of ownership solution to their advanced needs.
활성 등재물
4
서비스
검사, 보험, 감정, 물류
상위 등재물
LAM RESEARCH CORPORATION
TCP 9400
Dry / Plasma Etch빈티지: 조건: 중고마지막 검증일30일 이상 전LAM RESEARCH CORPORATION
TCP 9400
Dry / Plasma Etch빈티지: 조건: 중고마지막 검증일60일 이상 전LAM RESEARCH CORPORATION
TCP 9400
Dry / Plasma Etch빈티지: 조건: 중고마지막 검증일60일 이상 전LAM RESEARCH CORPORATION
TCP 9400
Dry / Plasma Etch빈티지: 조건: 개조됨마지막 검증일60일 이상 전