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StripOEM 모델 설명
The 300-mm Suprema strip system is based on a flexible, modular design that makes it ideal for both development and production environments. The system features vacuum and atmospheric robotics said to deliver increased throughput of greater than 300 wafers per hour. This represents more than a 40 percent improvement compared to competitive systems for bulk strip applications. Suprema's proprietary inductively coupled plasma source provides increased strip rates of over 9 microns/minute. Its vacuum robot utilizes a transfer mechanism, capable of transferring four wafers simultaneously, to minimize overhead time. Suprema can be configured with two dual-wafer modules.문서
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MATTSON
SUPREMA
카테고리
Dry / Plasma Etch
마지막 검증일: 60일 이상 전
주요 품목 세부 정보
조건:
Used
작동 상태:
알 수 없음
제품 ID:
65529
웨이퍼 사이즈:
12"/300mm
빈티지:
알 수 없음
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설명
설명 없음환경 설정
StripOEM 모델 설명
The 300-mm Suprema strip system is based on a flexible, modular design that makes it ideal for both development and production environments. The system features vacuum and atmospheric robotics said to deliver increased throughput of greater than 300 wafers per hour. This represents more than a 40 percent improvement compared to competitive systems for bulk strip applications. Suprema's proprietary inductively coupled plasma source provides increased strip rates of over 9 microns/minute. Its vacuum robot utilizes a transfer mechanism, capable of transferring four wafers simultaneously, to minimize overhead time. Suprema can be configured with two dual-wafer modules.문서
문서 없음