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설명
Operational as-is환경 설정
PlasmaTherm 720 RIE - Single chamber with load lock - Currently configured for 4" wafers - Can process up to 8"/200mm wafers (with proper tooling, available at additional cost) - Turbo Pump - AEI/RFPP RF5S 500W RF Generator - Leybold Trivac D65BCS Vacuum Pump - Leybold Trivac D25BCS Vacuum Pump - Neslab HX-75 Recirculating Chiller - Power Box - Process Software - Computer upgraded in 2011 by OEM / runs Win 98 - Set of Operation and Maintenance Manuals - 4 MFCs: *SF6 *N2 *CHF3 *O2OEM 모델 설명
미제공문서
문서 없음
카테고리
Dry / Plasma Etch
마지막 검증일: 60일 이상 전
주요 품목 세부 정보
조건:
Used
작동 상태:
알 수 없음
제품 ID:
36140
웨이퍼 사이즈:
4"/100mm, 8"/200mm
빈티지:
1995
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
유사 등재물
모두 보기
PLASMATHERM
SLR 720
카테고리
Dry / Plasma Etch
마지막 검증일: 60일 이상 전
주요 품목 세부 정보
조건:
Used
작동 상태:
알 수 없음
제품 ID:
36140
웨이퍼 사이즈:
4"/100mm, 8"/200mm
빈티지:
1995
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
설명
Operational as-is환경 설정
PlasmaTherm 720 RIE - Single chamber with load lock - Currently configured for 4" wafers - Can process up to 8"/200mm wafers (with proper tooling, available at additional cost) - Turbo Pump - AEI/RFPP RF5S 500W RF Generator - Leybold Trivac D65BCS Vacuum Pump - Leybold Trivac D25BCS Vacuum Pump - Neslab HX-75 Recirculating Chiller - Power Box - Process Software - Computer upgraded in 2011 by OEM / runs Win 98 - Set of Operation and Maintenance Manuals - 4 MFCs: *SF6 *N2 *CHF3 *O2OEM 모델 설명
미제공문서
문서 없음