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PLASMATHERM VERSALINE ETCH

설명

ICP Etch - 3 Chamber - All same process

환경 설정

System Configuration Transfer Module 150MM Dual Vacuum Loadlock Brooks Mag 7 Robot Ebara Dry Pump Process Modules ICP Gases BCL3 - 50sccm - Brooks GF125 CL2 - 50sccm - Brooks GF125 O2 - 100sccm - Brooks GF125 Ar - 100sccm - Brooks GF125 SF6 - 50sccm - Brooks GF125 N2 - 100sccm - Brooks GF125 HE - 100sccm - Brooks GF125 Turbo Pump - Edwards STP-A 1303CV Chiller - SMC Thermo Dry Pump - Ebara SR20N RF Gen #1 - ENI GWM-24A RF Gen #2 - MKS Elite

OEM 모델 설명

미제공

문서

파일 아이콘

Plasmatherm Versaline ICP.pdf

PLASMATHERM

VERSALINE ETCH

verified-listing-icon

검증됨

카테고리

Dry / Plasma Etch

마지막 검증일: 22일 전

주요 품목 세부 정보

조건:

Used

작동 상태:

알 수 없음

제품 ID:

138075

웨이퍼 사이즈:

6"/150mm

빈티지:

2016

Logistics Support

Available

Transaction Insured by Moov

Available

Refurbishment Services

Available

유사 등재물

PLASMATHERM VERSALINE ETCH

PLASMATHERM

VERSALINE ETCH

Dry / Plasma Etch

빈티지: 2016조건: 중고

마지막 검증일22일 전

PLASMATHERM VERSALINE ETCH

PLASMATHERM

VERSALINE ETCH

Dry / Plasma Etch

빈티지: 2012조건: 중고

마지막 검증일60일 이상 전

PLASMATHERM

VERSALINE ETCH

verified-listing-icon

검증됨

카테고리

Dry / Plasma Etch

마지막 검증일: 22일 전

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주요 품목 세부 정보

조건:

Used

작동 상태:

알 수 없음

제품 ID:

138075

웨이퍼 사이즈:

6"/150mm

빈티지:

2016

Logistics Support

Available

Transaction Insured by Moov

Available

Refurbishment Services

Available

설명

ICP Etch - 3 Chamber - All same process

환경 설정

System Configuration Transfer Module 150MM Dual Vacuum Loadlock Brooks Mag 7 Robot Ebara Dry Pump Process Modules ICP Gases BCL3 - 50sccm - Brooks GF125 CL2 - 50sccm - Brooks GF125 O2 - 100sccm - Brooks GF125 Ar - 100sccm - Brooks GF125 SF6 - 50sccm - Brooks GF125 N2 - 100sccm - Brooks GF125 HE - 100sccm - Brooks GF125 Turbo Pump - Edwards STP-A 1303CV Chiller - SMC Thermo Dry Pump - Ebara SR20N RF Gen #1 - ENI GWM-24A RF Gen #2 - MKS Elite

OEM 모델 설명

미제공

문서

파일 아이콘

Plasmatherm Versaline ICP.pdf

유사 등재물

PLASMATHERM VERSALINE ETCH

PLASMATHERM

VERSALINE ETCH

Dry / Plasma Etch빈티지: 2016조건: 중고마지막 검증일:22일 전

PLASMATHERM VERSALINE ETCH

PLASMATHERM

VERSALINE ETCH

Dry / Plasma Etch빈티지: 2012조건: 중고마지막 검증일:60일 이상 전