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설명
Main body. SMIF Loader Controller CRT Keyboard Through the wall SUS Front panel Al Side panel: Ni Coated Pump interface환경 설정
Gas system: (5) MFC Tylan FC-2900 CF4, C12, N2, 02, NF3 Quartz tube protection C mictube ESC Uni1.ersal chuck, 8" Water auxiliariesOEM 모델 설명
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SHIBAURA
CDE 80
카테고리
Dry / Plasma Etch
마지막 검증일: 60일 이상 전
주요 품목 세부 정보
조건:
Used
작동 상태:
알 수 없음
제품 ID:
29599
웨이퍼 사이즈:
8"/200mm
빈티지:
알 수 없음
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설명
Main body. SMIF Loader Controller CRT Keyboard Through the wall SUS Front panel Al Side panel: Ni Coated Pump interface환경 설정
Gas system: (5) MFC Tylan FC-2900 CF4, C12, N2, 02, NF3 Quartz tube protection C mictube ESC Uni1.ersal chuck, 8" Water auxiliariesOEM 모델 설명
미제공문서
문서 없음