설명
SPTS Synapse Chamber SPTS Synapse PM. Includes all the necessary components (gas panel, Rf generators, chiller, etc) to install on a new mainframe. It does not come with the dry pump.환경 설정
The gases are SF6, H2, CHF3, CF4, C4F8, He and O2. Powered on, in idle mode The ESC was replaced in 2025.OEM 모델 설명
Omega Synapse etch process module uses a high density plasma source and is designed to etch strongly bonded materials.문서
문서 없음
카테고리
Dry / Plasma Etch
마지막 검증일: 5일 전
주요 품목 세부 정보
조건:
Parts Tool
작동 상태:
알 수 없음
제품 ID:
146034
웨이퍼 사이즈:
알 수 없음
빈티지:
2016
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
KLA / SPTS
OMEGA SYNAPSE
카테고리
Dry / Plasma Etch
마지막 검증일: 5일 전
주요 품목 세부 정보
조건:
Parts Tool
작동 상태:
알 수 없음
제품 ID:
146034
웨이퍼 사이즈:
알 수 없음
빈티지:
2016
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
설명
SPTS Synapse Chamber SPTS Synapse PM. Includes all the necessary components (gas panel, Rf generators, chiller, etc) to install on a new mainframe. It does not come with the dry pump.환경 설정
The gases are SF6, H2, CHF3, CF4, C4F8, He and O2. Powered on, in idle mode The ESC was replaced in 2025.OEM 모델 설명
Omega Synapse etch process module uses a high density plasma source and is designed to etch strongly bonded materials.문서
문서 없음