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설명
Reactive Ion Etcher. Good Condition. -Deinstalled, warehoused. -In working condition -Manual loading -includes PC control system -includes manuals -includes Leybold mechanical pump -includes Leybold turbo pump -Leybold turbo pump controller type: Turbotronix NT 151 / 361환경 설정
-Cathode diameter: 30 cm -Cathode area: 706.5 cm2 -RF forward power range: 10 to 600 watts -Chamber max pressure: 500 mtorr -Substrate sizes: 2 to 8 inch and small fragments -Number of gas lines available: 8OEM 모델 설명
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STS
320 PC
카테고리
Dry / Plasma Etch
마지막 검증일: 60일 이상 전
주요 품목 세부 정보
조건:
Used
작동 상태:
알 수 없음
제품 ID:
28956
웨이퍼 사이즈:
8"/200mm
빈티지:
1995
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설명
Reactive Ion Etcher. Good Condition. -Deinstalled, warehoused. -In working condition -Manual loading -includes PC control system -includes manuals -includes Leybold mechanical pump -includes Leybold turbo pump -Leybold turbo pump controller type: Turbotronix NT 151 / 361환경 설정
-Cathode diameter: 30 cm -Cathode area: 706.5 cm2 -RF forward power range: 10 to 600 watts -Chamber max pressure: 500 mtorr -Substrate sizes: 2 to 8 inch and small fragments -Number of gas lines available: 8OEM 모델 설명
미제공문서
문서 없음