설명
Nitride Plasma Reactive Ion Etch환경 설정
1.Mainframe. Configured for dual loading of 6 inch cassettes. Singel nitride fitted process chamber MFC Configuration:- STEC 4400MC N2 200 sccm STEC 4400MC O2 100 sccm STEC 4400MC SF6 200 sccm STEC 4400MC He 1 slm STEC 4400MC CF4 200 sccm STEC 4400MC CHF3 200 sccm TYLAN PV104C He 20 slm Daihen Dauma 10SA with Daihen UIM-1-T1 display unit TYLAN PC73 HeLIUM BACK PRESSURE MONITOR 2.Electronics rack 3.Turbo pump. Seiko Seki MG-STPH600C-T52A 4.Pump controller rack with Seiko Seki MG-STPH600C-T54 turbo pump controller, 208V 3 Phase 12 KVA 190kg total power consumption. 6.Chamber backing pump Edwards CDP80 with Edwards gate valve model GVI 100M 7.Power supply Transformer, I/P 208VAC 3 PH O/P 200VAC 5A dimensions 31cm x 41cm x 42 cm (Height). 8. Chiller SMC Model INR-341-61A Triple Chiller Voltage= 200 3 phase 50/60 Hz 25A 350 kg dimensions 72 cm x 92 cm x 175 cm (height). -Deinstalled, warehoused. -In working conditionOEM 모델 설명
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TEL / TOKYO ELECTRON
TE 5480
검증됨
카테고리
Dry / Plasma Etch
마지막 검증일: 60일 이상 전
주요 품목 세부 정보
조건:
Used
작동 상태:
알 수 없음
제품 ID:
28958
웨이퍼 사이즈:
6"/150mm
빈티지:
1992
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
TEL / TOKYO ELECTRON
TE 5480
카테고리
Dry / Plasma Etch
마지막 검증일: 60일 이상 전
주요 품목 세부 정보
조건:
Used
작동 상태:
알 수 없음
제품 ID:
28958
웨이퍼 사이즈:
6"/150mm
빈티지:
1992
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
설명
Nitride Plasma Reactive Ion Etch환경 설정
1.Mainframe. Configured for dual loading of 6 inch cassettes. Singel nitride fitted process chamber MFC Configuration:- STEC 4400MC N2 200 sccm STEC 4400MC O2 100 sccm STEC 4400MC SF6 200 sccm STEC 4400MC He 1 slm STEC 4400MC CF4 200 sccm STEC 4400MC CHF3 200 sccm TYLAN PV104C He 20 slm Daihen Dauma 10SA with Daihen UIM-1-T1 display unit TYLAN PC73 HeLIUM BACK PRESSURE MONITOR 2.Electronics rack 3.Turbo pump. Seiko Seki MG-STPH600C-T52A 4.Pump controller rack with Seiko Seki MG-STPH600C-T54 turbo pump controller, 208V 3 Phase 12 KVA 190kg total power consumption. 6.Chamber backing pump Edwards CDP80 with Edwards gate valve model GVI 100M 7.Power supply Transformer, I/P 208VAC 3 PH O/P 200VAC 5A dimensions 31cm x 41cm x 42 cm (Height). 8. Chiller SMC Model INR-341-61A Triple Chiller Voltage= 200 3 phase 50/60 Hz 25A 350 kg dimensions 72 cm x 92 cm x 175 cm (height). -Deinstalled, warehoused. -In working conditionOEM 모델 설명
미제공문서
문서 없음