설명

Telius SP 305 SCCM Dielectric Etch Process Oxide Oxide Etch (3) Shin Chamber (6) EMO Front 3ea, Rear (3) RF Generator TOP (3) RF Generator BTM (3) RF Matcher TOP (3) RF Matcher BTM (12) Gas Line

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OEM 모델 설명

Telius-SP is a high-performance etching system designed for large diameter (300 mm) requirements. It is part of the Telius platform and offers improved productivity through increased throughput, a reduced footprint, and higher energy efficiency. The system can be fitted with various chamber applications, including DRM and SCCM chambers, to support a wide range of process areas. It can support up to 4 chambers and boasts a high throughput, compact design, and low cost of ownership (CoO). Additionally, the system is designed for ease of maintenance. Overall, Telius-SP is a versatile and cost-effective solution for large diameter etching needs.