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TRION MINILOCK
    설명
    RIE Single Wafer Plasma Metal Etcher 8” (dia.) Chuck RFX-600 RF Generator, 13.56 MHz Automatic RF Matching Network Vacuum Loadlock 4ea Mass Flow Controllers 100 sccm O2 100 sccm CF4 50 sccm Cl2 100 sccm BCl3 PC Process Controller Color Touch Screen Graphical User Interface
    환경 설정
    환경 설정 없음
    OEM 모델 설명
    The Minilock system incorporates a vacuum load-lock in a compact table top console. The system has been designed to meet all the safety and equipment needs for the more challenging processes in the laboratory environment. Its modular design and optional gas cabinet provide the user with a turnkey system that meets your safety, facility and processing needs. The Minilock is suitable for anisotropic etching of aluminum, silicides, gallium arsenide and other materials requiring chlorinated chemistries. It is also suitable for anisotropic etching of silicon dioxide, silicon nitride and other materials requiring high selectivity and a controlled anisotropic etch. The system specifications are 35"Wx26"Dx48"H with RF Power of 600 watt, 13.56 MHz and up to 6 Mass Flow Controllers. The maximum wafer size is up to 8".
    문서

    문서 없음

    TRION

    MINILOCK

    verified-listing-icon

    검증됨

    카테고리
    Dry / Plasma Etch

    마지막 검증일: 60일 이상 전

    주요 품목 세부 정보

    조건:

    Used


    작동 상태:

    알 수 없음


    제품 ID:

    12010


    웨이퍼 사이즈:

    8"/200mm


    빈티지:

    1995


    Have Additional Questions?
    Logistics Support
    Available
    Money Back Guarantee
    Available
    Transaction Insured by Moov
    Available
    Refurbishment Services
    Available
    유사 등재물
    모두 보기
    TRION MINILOCK

    TRION

    MINILOCK

    Dry / Plasma Etch
    빈티지: 1995조건: 중고
    마지막 검증일60일 이상 전

    TRION

    MINILOCK

    verified-listing-icon
    검증됨
    카테고리
    Dry / Plasma Etch
    마지막 검증일: 60일 이상 전
    listing-photo-0G_BNao6seyXb7HN91_jLBRYnuWDGjatlztu6t5LswU-https://media-moov-co.s3.us-west-1.amazonaws.com/user_media/listingPhoto/Ot4uSyt7j-OkIRBJeE4orTieeZmN71mOLX5X1zTe7fk/0G_BNao6seyXb7HN91_jLBRYnuWDGjatlztu6t5LswU/PjfY6G99W3yj5XeyZkMDlr_GOXV9JYbfKnfiCDzI4Zw_20190315_091716_f
    listing-photo-0G_BNao6seyXb7HN91_jLBRYnuWDGjatlztu6t5LswU-https://media-moov-co.s3.us-west-1.amazonaws.com/user_media/listingPhoto/Ot4uSyt7j-OkIRBJeE4orTieeZmN71mOLX5X1zTe7fk/0G_BNao6seyXb7HN91_jLBRYnuWDGjatlztu6t5LswU/W3g31xiEUEyTlDKAVQzCq1A-q8De8OOsSE2f7CuyCkE_20190315_091716_f
    listing-photo-0G_BNao6seyXb7HN91_jLBRYnuWDGjatlztu6t5LswU-https://media-moov-co.s3.us-west-1.amazonaws.com/user_media/listingPhoto/Ot4uSyt7j-OkIRBJeE4orTieeZmN71mOLX5X1zTe7fk/0G_BNao6seyXb7HN91_jLBRYnuWDGjatlztu6t5LswU/w94r2jiHnVhsgsqF0sr1tUYpaVex_fWnaRJFjHp-3OU_20190315_091716_f
    listing-photo-0G_BNao6seyXb7HN91_jLBRYnuWDGjatlztu6t5LswU-https://media-moov-co.s3.us-west-1.amazonaws.com/user_media/listingPhoto/Ot4uSyt7j-OkIRBJeE4orTieeZmN71mOLX5X1zTe7fk/0G_BNao6seyXb7HN91_jLBRYnuWDGjatlztu6t5LswU/VOx47fda_If0GnyLNM4Kz8itWGU4Rznc8zbW6wvYDTM_20190315_091716_f
    listing-photo-0G_BNao6seyXb7HN91_jLBRYnuWDGjatlztu6t5LswU-https://media-moov-co.s3.us-west-1.amazonaws.com/user_media/listingPhoto/Ot4uSyt7j-OkIRBJeE4orTieeZmN71mOLX5X1zTe7fk/0G_BNao6seyXb7HN91_jLBRYnuWDGjatlztu6t5LswU/UAmTbyoCMHyptIhUwRACs8KXtqTS0144tjkILCch5zQ_20190315_091716_f
    listing-photo-0G_BNao6seyXb7HN91_jLBRYnuWDGjatlztu6t5LswU-https://media-moov-co.s3.us-west-1.amazonaws.com/user_media/listingPhoto/Ot4uSyt7j-OkIRBJeE4orTieeZmN71mOLX5X1zTe7fk/0G_BNao6seyXb7HN91_jLBRYnuWDGjatlztu6t5LswU/nZgRrZV4KF3kUL5aH-u2BjZqbao1dAf4E_Olr4pbeY8_20190315_091716_f
    주요 품목 세부 정보

    조건:

    Used


    작동 상태:

    알 수 없음


    제품 ID:

    12010


    웨이퍼 사이즈:

    8"/200mm


    빈티지:

    1995


    Have Additional Questions?
    Logistics Support
    Available
    Money Back Guarantee
    Available
    Transaction Insured by Moov
    Available
    Refurbishment Services
    Available
    설명
    RIE Single Wafer Plasma Metal Etcher 8” (dia.) Chuck RFX-600 RF Generator, 13.56 MHz Automatic RF Matching Network Vacuum Loadlock 4ea Mass Flow Controllers 100 sccm O2 100 sccm CF4 50 sccm Cl2 100 sccm BCl3 PC Process Controller Color Touch Screen Graphical User Interface
    환경 설정
    환경 설정 없음
    OEM 모델 설명
    The Minilock system incorporates a vacuum load-lock in a compact table top console. The system has been designed to meet all the safety and equipment needs for the more challenging processes in the laboratory environment. Its modular design and optional gas cabinet provide the user with a turnkey system that meets your safety, facility and processing needs. The Minilock is suitable for anisotropic etching of aluminum, silicides, gallium arsenide and other materials requiring chlorinated chemistries. It is also suitable for anisotropic etching of silicon dioxide, silicon nitride and other materials requiring high selectivity and a controlled anisotropic etch. The system specifications are 35"Wx26"Dx48"H with RF Power of 600 watt, 13.56 MHz and up to 6 Mass Flow Controllers. The maximum wafer size is up to 8".
    문서

    문서 없음

    유사 등재물
    모두 보기
    TRION MINILOCK

    TRION

    MINILOCK

    Dry / Plasma Etch빈티지: 1995조건: 중고마지막 검증일:60일 이상 전