설명
설명 없음환경 설정
Details Attached System: System controller Board no missing Loadlock Widebody ENP 0240-70932 / 0240-70933 No Process Kit (Quartz part, Robot blade, Graphite process kit) include No 208V External transformer includ EPI Variable speed blower (#A,B,C) Dop1 N2 860cc Brooks / Dop2 H2 500cc UFC8100 H2 Main → N2 20L UFC1660 / H2 20L UFC1661 Chamber A: 1) Baratron Gauge Model : 1000T MKS 623B13TBE Single 2) Pyrometer Model : Ircon MRT39999C(K118) 2ea (Upper / Lower → Aux N/A) 3) Rotation assy 0010-26665 → In the Part Box Chamber B: 1) Baratron Gauge Model : 1000T MKS 623B13TBE Single 2) Pyrometer Model : Ircon MRT39999C(K118) 2ea (Upper / Lower → Aux N/A) 3) Rotation assy 0010-26665 → In the Part Box Chamber C: 1) Baratron Gauge Model : 1000T MKS 623B13TBE Single 2) Pyrometer Model : Ircon MRT39999C(K118) 2ea (Upper / Lower → Aux N/A) 3) Rotation assy 0010-26665 → In the Part BoxOEM 모델 설명
The Centura EPI is a state-of-the-art system that offers the advantages of single-wafer, multi-chamber design for epi deposition. This advanced system provides high throughput, lower cost of ownership benefits, and advanced robotics. The Centura EPI has recently undergone productivity enhancements, including the new AccuSETT remote system for accurate stepper enhanced thickness and In-Line Metrology for integrated FTIR in the cooldown chamber. These enhancements make the Centura EPI an even more powerful tool for epi deposition.문서
카테고리
Epitaxial deposition (EPI)
마지막 검증일: 9일 전
주요 품목 세부 정보
조건:
Used
작동 상태:
알 수 없음
제품 ID:
155986
웨이퍼 사이즈:
알 수 없음
빈티지:
2006
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
유사 등재물
모두 보기
APPLIED MATERIALS (AMAT)
CENTURA EPI
카테고리
Epitaxial deposition (EPI)
마지막 검증일: 9일 전
주요 품목 세부 정보
조건:
Used
작동 상태:
알 수 없음
제품 ID:
155986
웨이퍼 사이즈:
알 수 없음
빈티지:
2006
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available