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설명
MISSING PARTS: (1 set) Quartz wares - process tube, etc. Software OS: CX3000 Equipment status: Out of Fab Process: PYRO Type: Diffusion Air valve: FUJIKIN MFC, MFM: HORIBA STEC Three phase power: 3Ø AC 200V Single phase power: 1Ø AC 100V Main/APC: EC-5200 CU (HORIBA STEC) Gas: N2 / H2 / O2환경 설정
Process: PYRO The furnace subsystem includes the following major components: - Automation system - Heater - Process chamber - Cooling water unit - Scavenger - Temperature controller The gas subsystem includes the following major components: - Power box ( consists of the primary power supply and the power control system ) - Gas supply unit - Exhaust - Vacuum line ( for LPCVD systems ) - Temperature controller Power box ( consists of the primary power supply and the power control system ) Rapid cooling unit ( option for Fast Thermal Processing Systems ) Pump box ( option for LPCVD systems )OEM 모델 설명
미제공문서
문서 없음
카테고리
Furnaces / Diffusion
마지막 검증일: 60일 이상 전
주요 품목 세부 정보
조건:
Used
작동 상태:
알 수 없음
제품 ID:
73212
웨이퍼 사이즈:
6"/150mm
빈티지:
2011
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
유사 등재물
모두 보기
KOKUSAI-ELECTRIC (KE)
DD-812V
카테고리
Furnaces / Diffusion
마지막 검증일: 60일 이상 전
주요 품목 세부 정보
조건:
Used
작동 상태:
알 수 없음
제품 ID:
73212
웨이퍼 사이즈:
6"/150mm
빈티지:
2011
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
설명
MISSING PARTS: (1 set) Quartz wares - process tube, etc. Software OS: CX3000 Equipment status: Out of Fab Process: PYRO Type: Diffusion Air valve: FUJIKIN MFC, MFM: HORIBA STEC Three phase power: 3Ø AC 200V Single phase power: 1Ø AC 100V Main/APC: EC-5200 CU (HORIBA STEC) Gas: N2 / H2 / O2환경 설정
Process: PYRO The furnace subsystem includes the following major components: - Automation system - Heater - Process chamber - Cooling water unit - Scavenger - Temperature controller The gas subsystem includes the following major components: - Power box ( consists of the primary power supply and the power control system ) - Gas supply unit - Exhaust - Vacuum line ( for LPCVD systems ) - Temperature controller Power box ( consists of the primary power supply and the power control system ) Rapid cooling unit ( option for Fast Thermal Processing Systems ) Pump box ( option for LPCVD systems )OEM 모델 설명
미제공문서
문서 없음