설명
Install Type: Through-the-wall System Status: On-Line (operational at time of inspection) Wafer Production (AS IS): Yes - system can produce wafers in current condition Known Field Modifications: None All Cables Present: Yes Process Name: Oxide • Front Surface Finish: White • Process Pressure: Atmospheric • Number of Zones: 5 • Temperature Controller: Model 121 • Inner TC Type: In-line • Rapid Cooling Unit: No • Boat Rotation: Yes • Signal Lamp Tower: Yes • Gas Leak Detection: Yes Wafer Handling • Wafer Size: 8 inch (200 mm) • Wafer Type: Notch • Number of Slots: 26 • Bolt-On SMIF: No • Integrated SMIF: No • Stocker: 21-slot carrier • N2 Purge System: Yes Control & Software • System Controller: TS-4000Z • Software Version: V07.06 • Date of Last PM: 2020 (last use) • Temperature Range: 960 °C (max. 1025 °C) • FTP Heater: No Transfer & Sensing • Tube Seal: Lip Seal • Transfer Stage: Equipped • Wafer Position Sensor: Yes • Fork Wafer Present Sensor: Yes • Notch Alignment: No (function not in use) • Fork Wafer Position Sensor: Yes환경 설정
ATM OxideOEM 모델 설명
The ALPHA-8S is a popular batch thermal processing system for silicon wafers up to 200mm in size. It has been continuously improved to maximize efficiency and productivity, setting the standard for vertical furnaces. The system is versatile, supporting a wide range of process applications such as Wet/Dry Oxidation, Anneal, and LPCVD of Si, Si3N4, and SiO2. Additionally, various types of Up Grade Kits (UGK) are available to enhance productivity and extend the product’s life, including a GUI controller and other options문서
카테고리
Furnaces / Diffusion
마지막 검증일: 25일 전
주요 품목 세부 정보
조건:
Used
작동 상태:
알 수 없음
제품 ID:
136981
웨이퍼 사이즈:
8"/200mm
빈티지:
1997
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
유사 등재물
모두 보기
TEL / TOKYO ELECTRON
ALPHA-8S
카테고리
Furnaces / Diffusion
마지막 검증일: 25일 전
주요 품목 세부 정보
조건:
Used
작동 상태:
알 수 없음
제품 ID:
136981
웨이퍼 사이즈:
8"/200mm
빈티지:
1997
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available