설명
With HDD환경 설정
-Software OS: Linux -Process: PYRO -Type: DIFF -AIR VALVE: FUJIKIN, CKD -Heater: VOS-40-017 3471206Z2164 -MFC,MFM: AREA -Three phase power: AC 208V -MAIN: CKD -Single phase power: AC 120V (STEP DOWN TRANS) -APC: CKD -GAS: N2,O2,H2,TLCOEM 모델 설명
The Alpha-8SE is a batch thermal processing system that covers multiple applications over a wide temperature range. It was introduced for 200mm wafer processing in the mid-1990s and has undergone continuous improvements to productivity, reliability, and stability. The Alpha-8SE supports 100/150/200mm wafer sizes and up to 150 wafer batch size for semiconductor thin film applications including oxidation & anneal, LPCVD of Si (Poly, a-Si), Si3N4, SiO2, and high-k ALD. It enables performance for today’s most advanced diffusion and deposition processes such as ALD (Atomic Layer Deposition), low-pressure radical oxidation, and low-temperature nitrides.문서
문서 없음
TEL / TOKYO ELECTRON
ALPHA-8SE
검증됨
카테고리
Furnaces / Diffusion
마지막 검증일: 30일 이상 전
주요 품목 세부 정보
조건:
Used
작동 상태:
알 수 없음
제품 ID:
115927
웨이퍼 사이즈:
알 수 없음
빈티지:
2007
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
유사 등재물
모두 보기
TEL / TOKYO ELECTRON
ALPHA-8SE
카테고리
Furnaces / Diffusion
마지막 검증일: 30일 이상 전
주요 품목 세부 정보
조건:
Used
작동 상태:
알 수 없음
제품 ID:
115927
웨이퍼 사이즈:
알 수 없음
빈티지:
2007
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
설명
With HDD환경 설정
-Software OS: Linux -Process: PYRO -Type: DIFF -AIR VALVE: FUJIKIN, CKD -Heater: VOS-40-017 3471206Z2164 -MFC,MFM: AREA -Three phase power: AC 208V -MAIN: CKD -Single phase power: AC 120V (STEP DOWN TRANS) -APC: CKD -GAS: N2,O2,H2,TLCOEM 모델 설명
The Alpha-8SE is a batch thermal processing system that covers multiple applications over a wide temperature range. It was introduced for 200mm wafer processing in the mid-1990s and has undergone continuous improvements to productivity, reliability, and stability. The Alpha-8SE supports 100/150/200mm wafer sizes and up to 150 wafer batch size for semiconductor thin film applications including oxidation & anneal, LPCVD of Si (Poly, a-Si), Si3N4, SiO2, and high-k ALD. It enables performance for today’s most advanced diffusion and deposition processes such as ALD (Atomic Layer Deposition), low-pressure radical oxidation, and low-temperature nitrides.문서
문서 없음