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TEL / TOKYO ELECTRON TELINDY PLUS
    설명
    MISSING PARTS: (1 set) Quartz wares - process tube, etc. Software OS: TEL Waves Equipment status: Out of Fab Type: Diffusion Air valve: FUJIKIN MFC, MFM: HORIBA STEC Three phase power: 3Ø AC 440V Single phase power: 1Ø AC 208V Main/APC: CKD GAS: HF, O2, O3, PN2, LTO520 Others: KAWASAKI MECHA
    환경 설정
    INDY PLUS-B-M Process: ALD (SiO2) The furnace subsystem includes the following major components: - Automation system - Heater - Process chamber - Temperature controller - Scavenger - Cooling water unit The gas subsystem includes the following major components: - Gas supply unit - Exhaust - Vacuum line ( for LPCVD systems ) Power box ( consists of the primary power supply and the power control system ) Rapid cooling unit ( option for Fast Thermal Processing Systems ) Pump box ( option for LPCVD systems )
    OEM 모델 설명
    TELINDY PLUS™ is a cutting-edge thermal processing technology that combines the best features of the TELFORMULA™ minibatch system and the previous generation TELINDY™ platform. It offers improved process performance and productivity, with new enhancements such as improved maintenance access, dry gas chamber cleaning, and low O2 environment loading area control. These features contribute to yield increases by managing small particles more effectively. The highest levels of productivity are achieved by combining a 125 wafer load size with TEL’s FTPS™ responsive heater and a dual boat system option. TELINDY PLUS™ can be used for a wide range of applications, from traditional silicon treatments to leading edge ALD processes and radical oxidation. It represents the convergence of demonstrated experience and advanced technology, making it a powerful tool for thermal processing.
    문서

    문서 없음

    TEL / TOKYO ELECTRON

    TELINDY PLUS

    verified-listing-icon

    검증됨

    카테고리
    Furnaces / Diffusion

    마지막 검증일: 60일 이상 전

    주요 품목 세부 정보

    조건:

    Used


    작동 상태:

    알 수 없음


    제품 ID:

    72832


    웨이퍼 사이즈:

    12"/300mm


    빈티지:

    2013


    Have Additional Questions?
    Logistics Support
    Available
    Money Back Guarantee
    Available
    Transaction Insured by Moov
    Available
    Refurbishment Services
    Available
    유사 등재물
    모두 보기
    TEL / TOKYO ELECTRON TELINDY PLUS

    TEL / TOKYO ELECTRON

    TELINDY PLUS

    Furnaces / Diffusion
    빈티지: 2010조건: 중고
    마지막 검증일60일 이상 전

    TEL / TOKYO ELECTRON

    TELINDY PLUS

    verified-listing-icon
    검증됨
    카테고리
    Furnaces / Diffusion
    마지막 검증일: 60일 이상 전
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    주요 품목 세부 정보

    조건:

    Used


    작동 상태:

    알 수 없음


    제품 ID:

    72832


    웨이퍼 사이즈:

    12"/300mm


    빈티지:

    2013


    Have Additional Questions?
    Logistics Support
    Available
    Money Back Guarantee
    Available
    Transaction Insured by Moov
    Available
    Refurbishment Services
    Available
    설명
    MISSING PARTS: (1 set) Quartz wares - process tube, etc. Software OS: TEL Waves Equipment status: Out of Fab Type: Diffusion Air valve: FUJIKIN MFC, MFM: HORIBA STEC Three phase power: 3Ø AC 440V Single phase power: 1Ø AC 208V Main/APC: CKD GAS: HF, O2, O3, PN2, LTO520 Others: KAWASAKI MECHA
    환경 설정
    INDY PLUS-B-M Process: ALD (SiO2) The furnace subsystem includes the following major components: - Automation system - Heater - Process chamber - Temperature controller - Scavenger - Cooling water unit The gas subsystem includes the following major components: - Gas supply unit - Exhaust - Vacuum line ( for LPCVD systems ) Power box ( consists of the primary power supply and the power control system ) Rapid cooling unit ( option for Fast Thermal Processing Systems ) Pump box ( option for LPCVD systems )
    OEM 모델 설명
    TELINDY PLUS™ is a cutting-edge thermal processing technology that combines the best features of the TELFORMULA™ minibatch system and the previous generation TELINDY™ platform. It offers improved process performance and productivity, with new enhancements such as improved maintenance access, dry gas chamber cleaning, and low O2 environment loading area control. These features contribute to yield increases by managing small particles more effectively. The highest levels of productivity are achieved by combining a 125 wafer load size with TEL’s FTPS™ responsive heater and a dual boat system option. TELINDY PLUS™ can be used for a wide range of applications, from traditional silicon treatments to leading edge ALD processes and radical oxidation. It represents the convergence of demonstrated experience and advanced technology, making it a powerful tool for thermal processing.
    문서

    문서 없음

    유사 등재물
    모두 보기
    TEL / TOKYO ELECTRON TELINDY PLUS

    TEL / TOKYO ELECTRON

    TELINDY PLUS

    Furnaces / Diffusion빈티지: 2010조건: 중고마지막 검증일:60일 이상 전
    TEL / TOKYO ELECTRON TELINDY PLUS

    TEL / TOKYO ELECTRON

    TELINDY PLUS

    Furnaces / Diffusion빈티지: 2010조건: 개조됨마지막 검증일:60일 이상 전
    TEL / TOKYO ELECTRON TELINDY PLUS

    TEL / TOKYO ELECTRON

    TELINDY PLUS

    Furnaces / Diffusion빈티지: 0조건: 중고마지막 검증일:60일 이상 전