
설명
설명 없음환경 설정
환경 설정 없음OEM 모델 설명
The GSD/200E2 is a 200mm standard high current implanter with a maximum energy of 180KeV. It offers reliable, high productivity and exceptional product control with unmatched cost of ownership. It meets advanced manufacturing requirements through the 180nm node and maintains high throughput for quad implants used for trench doping. It features an Extended Life Source, a Xenon-based Plasma Electron Flood, and real-time dose control for consistent low doses.문서
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AXCELIS
GSD 200E2
카테고리
High Current
마지막 검증일: 어제
주요 품목 세부 정보
조건:
Used
작동 상태:
Deinstalled
제품 ID:
124984
웨이퍼 사이즈:
알 수 없음
빈티지:
2001
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설명
설명 없음환경 설정
환경 설정 없음OEM 모델 설명
The GSD/200E2 is a 200mm standard high current implanter with a maximum energy of 180KeV. It offers reliable, high productivity and exceptional product control with unmatched cost of ownership. It meets advanced manufacturing requirements through the 180nm node and maintains high throughput for quad implants used for trench doping. It features an Extended Life Source, a Xenon-based Plasma Electron Flood, and real-time dose control for consistent low doses.문서
문서 없음