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설명
Installed Working Condition.환경 설정
Type: NV8200P Dose2 Block3 Energy Config: 0 - 250Kv Midcurrent CE-Conformity: Yes Cryo-Pumps: 3x CTI Onboard 8 Cryo-Kompressor: CTI 9650 Low-Voltage Turbo-Pumps: Leybold: LH600C + LH1000C + LH151C Rough-Pumps: Edwards: ODP40 + QDP40 + IQDP80/QMB250 Wafersize: 8inch(200mm) Clamp-Type: E-Chuck with Non-μC Controller Wafer-Cooling: Galden HT110 with 20 degree Heatexchanger Gasbox: 3x Toxic 0,5L Size String1: Argon Carriergas; SEC-4400 String2: BF3 SDS-Low-Pressure Type VCR 1/4"; Brooks String3: PH3 SDS-Low-Pressure Type VCR 1/4"; MKS1640 String4: AsH3 SDS-Low-Pressure Type VCR 1/4"; MKS1640 Beam-Profiler Type: Belt-Drive Gear-Type's: Scan: Harmonic Tilt: Harmonic Source-Type: ELS4 IHC-Source without Vaporizer HV-Transformer: Mineral-Oil Light-Tower: red/yellow/green; no buzzer Main-Workstation Solaris SUN AXI 4HE Second-Workstation Solaris SUN Sparc5 Software-Version: 5.1.4.1 Network: 24port 100MB Ethernet Cell-Controller: 177 TypeOEM 모델 설명
NV-8200P, high current, parallel beam scan, uses GSD-A end station.문서
문서 없음
AXCELIS
NV 8200P
카테고리
High Current
마지막 검증일: 60일 이상 전
주요 품목 세부 정보
조건:
Used
작동 상태:
알 수 없음
제품 ID:
39175
웨이퍼 사이즈:
8"/200mm
빈티지:
1995
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
설명
Installed Working Condition.환경 설정
Type: NV8200P Dose2 Block3 Energy Config: 0 - 250Kv Midcurrent CE-Conformity: Yes Cryo-Pumps: 3x CTI Onboard 8 Cryo-Kompressor: CTI 9650 Low-Voltage Turbo-Pumps: Leybold: LH600C + LH1000C + LH151C Rough-Pumps: Edwards: ODP40 + QDP40 + IQDP80/QMB250 Wafersize: 8inch(200mm) Clamp-Type: E-Chuck with Non-μC Controller Wafer-Cooling: Galden HT110 with 20 degree Heatexchanger Gasbox: 3x Toxic 0,5L Size String1: Argon Carriergas; SEC-4400 String2: BF3 SDS-Low-Pressure Type VCR 1/4"; Brooks String3: PH3 SDS-Low-Pressure Type VCR 1/4"; MKS1640 String4: AsH3 SDS-Low-Pressure Type VCR 1/4"; MKS1640 Beam-Profiler Type: Belt-Drive Gear-Type's: Scan: Harmonic Tilt: Harmonic Source-Type: ELS4 IHC-Source without Vaporizer HV-Transformer: Mineral-Oil Light-Tower: red/yellow/green; no buzzer Main-Workstation Solaris SUN AXI 4HE Second-Workstation Solaris SUN Sparc5 Software-Version: 5.1.4.1 Network: 24port 100MB Ethernet Cell-Controller: 177 TypeOEM 모델 설명
NV-8200P, high current, parallel beam scan, uses GSD-A end station.문서
문서 없음