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설명
설명 없음환경 설정
(1) General E500 Medium Current Ion Implanter (HP/EHP/EHPi) E-1000 Wafer size 8 inches (2) Gas cabinet Gas cylinder volume (liter) HP Ar (External or Internal) External AsH3 cylinder type (HP or SDS) SDS PH3 cylinder type (HP or SDS) SDS BF3 cylinder type (HP or SDS) SDS Gas line purge YES Vaporizer P.S. (Yes or No) None (3) Source Source head type ELS (4) Beamline Scan generator YES Automatic Graded Decel - Decel relay & P/S (Yes or No) YES Hall Probe (Yes or No) YES Beam Energy Probe (Yes or No) YES (5) End station END STATION MODEL DISK VESDA Smoke Detectors (Yes or No) NO(STANDARD) Service Monitor (Yes or No) Yes Software Version N/A (6) High Voltage Extraction Power Supply 0 keV ~ 60keV Acceleration Power Supply 0 keV ~ 120keVOEM 모델 설명
The Varian E1000 is a high current implanter that leverages Varian’s pioneering single-wafer high current technology to deliver high yields and the industry’s best productivity. Innovations on the dual-magnet ribbon beam architecture improve beam line transmission, on-wafer beam utilization, and beam current output.문서
문서 없음
카테고리
High Current
마지막 검증일: 20일 전
주요 품목 세부 정보
조건:
Used
작동 상태:
알 수 없음
제품 ID:
106506
웨이퍼 사이즈:
8"/200mm
빈티지:
1997
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
유사 등재물
모두 보기
APPLIED MATERIALS (AMAT) / VARIAN
E1000
카테고리
High Current
마지막 검증일: 20일 전
주요 품목 세부 정보
조건:
Used
작동 상태:
알 수 없음
제품 ID:
106506
웨이퍼 사이즈:
8"/200mm
빈티지:
1997
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
설명
설명 없음환경 설정
(1) General E500 Medium Current Ion Implanter (HP/EHP/EHPi) E-1000 Wafer size 8 inches (2) Gas cabinet Gas cylinder volume (liter) HP Ar (External or Internal) External AsH3 cylinder type (HP or SDS) SDS PH3 cylinder type (HP or SDS) SDS BF3 cylinder type (HP or SDS) SDS Gas line purge YES Vaporizer P.S. (Yes or No) None (3) Source Source head type ELS (4) Beamline Scan generator YES Automatic Graded Decel - Decel relay & P/S (Yes or No) YES Hall Probe (Yes or No) YES Beam Energy Probe (Yes or No) YES (5) End station END STATION MODEL DISK VESDA Smoke Detectors (Yes or No) NO(STANDARD) Service Monitor (Yes or No) Yes Software Version N/A (6) High Voltage Extraction Power Supply 0 keV ~ 60keV Acceleration Power Supply 0 keV ~ 120keVOEM 모델 설명
The Varian E1000 is a high current implanter that leverages Varian’s pioneering single-wafer high current technology to deliver high yields and the industry’s best productivity. Innovations on the dual-magnet ribbon beam architecture improve beam line transmission, on-wafer beam utilization, and beam current output.문서
문서 없음