설명
HE-Ion Implanter Comes with pumps and chillers환경 설정
-High energy batch implant tool, 200mm capability -Energy range 10 – 3750keV -10-site-disk → 10 wafers per batch @200mm wafer diameter, automatic handling system, -Fully automated gas box → 4 gas modules •Argon (factory inlet), •PH3 SDS® •AsH3 SDS® •BF3 SDS® -On-Board-Argon option installed (semi automated filling of stripper reservoirs), -SECS/GEM Factory automation available, Software version 6.41OEM 모델 설명
미제공문서
APPLIED MATERIALS (AMAT) / VARIAN
KESTREL
검증됨
카테고리
High Current
마지막 검증일: 19일 전
주요 품목 세부 정보
조건:
Used
작동 상태:
Installed / Running
제품 ID:
111719
웨이퍼 사이즈:
알 수 없음
빈티지:
2003
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
APPLIED MATERIALS (AMAT) / VARIAN
KESTREL
카테고리
High Current
마지막 검증일: 19일 전
주요 품목 세부 정보
조건:
Used
작동 상태:
Installed / Running
제품 ID:
111719
웨이퍼 사이즈:
알 수 없음
빈티지:
2003
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available