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설명
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Vacuum Chamber: SUS304, φ1550mm×1800mm (H) Substrate Dome Size: φ1400mm Substrate Dome Rotation Speed: 10 rpm to 30 rpm (Variable) Optical Film Thickness Control System: HOM2-R-VIS350A High-precision Optical Monitor Wavelength range: 350nm to 1100nm Reflection/Transmittance Crystal Film Thickness Monitor: XTC/3 plus 6-point rotary sensor Evaporation Source EB source: 2 units, (JEOL JST-10F) Ion Source: 17 cm RF ion source Vacuum System: Roughing Pump(Edwards EM275), 2 Diffusion Pumps + Polycold (MaxCool 4000H) Ultimate Pressure: 7.0×10-5 Pa or lower Pump Down Rate: 15 minutes (Atm. to 1.3×10-3 Pa) Substrate Heater: 350℃ (max.) Layout Dimensions: 5500mm (W)×7200mm (D)×3700mm (H) approx. Power Requirements: 3-phase, 200V, 50/60Hz, 120kVA approx. Cooling Water Flow Rate: 180ℓ/min or greater Compressed Air Pressure: 0.5MPa or greater Gross Weight: 10000kg approx.OEM 모델 설명
미제공문서
OPTORUN
OTFC-1550
카테고리
Ion Beam / IBD
마지막 검증일: 26일 전
주요 품목 세부 정보
조건:
Used
작동 상태:
Deinstalled
제품 ID:
128770
웨이퍼 사이즈:
알 수 없음
빈티지:
2015
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available