설명
High-Energy Ion Implanter환경 설정
Ion Source Assembly Mass Analyzer Magnet RF Linear Accelerator (Multi-Stage RF Resonant Cavities) Wafer Processing Station Power Distribution Rack Vacuum Measurement Control Cabinets Wafer loading interface (EFEM/load port)OEM 모델 설명
High energy implanter. processing 300-mm wafers, the HE3 produces higher ion energies than the GSD/HE in a package that incorporates higher efficiency linear accelerator technology. The system layout has also been optimized so that footprint is reduced compared to the GSD/VHE while maintaining the same twin well and triple well process capability. A new endstation capable of batch processing 300-mm wafers, at a mechanical throughput equal to or exceeding that for 200-mm wafers in the GSD/HE system, has been developed.문서
문서 없음
카테고리
Ion Implantation
마지막 검증일: 2일 전
주요 품목 세부 정보
조건:
Used
작동 상태:
알 수 없음
제품 ID:
158121
웨이퍼 사이즈:
알 수 없음
빈티지:
2015
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
유사 등재물
모두 보기
AXCELIS
NV GSD HE3
카테고리
Ion Implantation
마지막 검증일: 2일 전
주요 품목 세부 정보
조건:
Used
작동 상태:
알 수 없음
제품 ID:
158121
웨이퍼 사이즈:
알 수 없음
빈티지:
2015
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
설명
High-Energy Ion Implanter환경 설정
Ion Source Assembly Mass Analyzer Magnet RF Linear Accelerator (Multi-Stage RF Resonant Cavities) Wafer Processing Station Power Distribution Rack Vacuum Measurement Control Cabinets Wafer loading interface (EFEM/load port)OEM 모델 설명
High energy implanter. processing 300-mm wafers, the HE3 produces higher ion energies than the GSD/HE in a package that incorporates higher efficiency linear accelerator technology. The system layout has also been optimized so that footprint is reduced compared to the GSD/VHE while maintaining the same twin well and triple well process capability. A new endstation capable of batch processing 300-mm wafers, at a mechanical throughput equal to or exceeding that for 200-mm wafers in the GSD/HE system, has been developed.문서
문서 없음